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Email??WangYi@MEMSConsulting.com

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Day 1 Morning: ?????????
1. Substrates and bonding ????????
2. Vapor deposition ???????

Day 1 Afternoon: ?????????
3. Wet deposition ?????
4. Epitaxy and oxidation ?????????
5. Doping ????

Day 2 Morning: ?????????
6. Laser Patterning ??????????
7. Photolithography ????
8. Advanced lithography ??????

Day 2 Afternoon: ????????磺
9. Wet etching ??????
10. Plasma etching ????????
11. Polymer microprocessing ??????????

Day 3 Morning: ?????????磺
12. MEMS ???????
13. Chip packaging о????
14. Microfluidics ?????

Day 3 Afternoon: ?????????磺
15. Electrical and optical PCB's ???????? PCB
16. Flexible and stretchable circuits ????????????·

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Erwin Bosman ?????? ?????

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Jan Vanfleteren ?? ??????????

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Jan Vanfleteren????????????????????????λ????????IMEC??????????????????????з???????????θ???????????????з???????????????????????????????????????????????????????????????塢???????????????????á?????????????????Э???????????????????????飬????granted FP7-ICT-IP-“TERASEL”?????????????????????????????????????????????ε?·?о????????????????????????????????????200?????????130????????ISI Web of Knowledge????????????????????????80?????????2008?????

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