Emerging MEMS Sensor and Actuator Technologies

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??????????3???? ???? Michael Kraft

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??????????3???? ???? Michael Kraft

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Michael Kraft????

Michael Kraft?????????2017?????α????3??????KU Leuven??????????????????????3???????????Micro & Nano Systems???о???????????????????о?????LIMNI???????????????????imec??????????????о?С????????22?????????4????????2???????????

?????3????????Michael Kraft??????????University of Liege????????2015??2017????????Microsys?????2012??2014??????1?????????????????Fraunhofer????????·?????о???????????????????Σ???????????????????????????????о??????????????ζ??????-????????University of Duisburg-Essen???????????W3?????λ??

1999????2012??Michael Kraft???????????????University of Southampton???ν????????????????????1993????????????????-????????????-?????????????????????????????????λ??1997 ????????????????????Coventry University??????λ???о??????MEMS??????????????????????????University of California???????????????????????????????????о?????MEMS???????

Michael Kraft???????????????????????????????????·???????20???????顣????MEMS???????????????????????????????MEMS?????????????????ɡ????????????????????????????????????????300?????????????????????????????MEMS????????????????????????????????????????????????????????Transducers??ISSCC??IEEE Sensors??Eurosensors??MNE??MME???????ι?IEEE Sensors Letter??IEEE JMEMS??MDPI Sensors??AMA Journal of Sensors and Sensors Systems????????????

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