?????????????????TTUF????????????????????豸??????????????TTUF??????????????綣??????????????????С???????е???á?

?????????????????????????????о??????????????????????????ScAlN????????е????????????PMUT????С???TTUF?????????TTUF????????????PMUT????????????π???????PMUT????13  x  13?????ε????????2.8  mm x 2.8 mm?????????????????跡?????PMUT??????????????????PU?????????????PMUT????????????????????????????????????0.94  MPa/V?????????????1.79  mV/kPa????????е?????1  MHz??????π????????羭????????????82  ns/??m/s?????????????????15 dB????????SNR?????????о???????????PMUT?????TDC-GP30???С????????????????????TTUF??????4 mm????????????2∼300 L/h??Χ?????????????????С?????????????????TTUF????????????????0.2%??1%????????????TTUF?????????????????????????????????????

????о??????У?????????????????????????PMUT?????????????????????ɡ????????????????????С???????????????????綣??????С????????????PMUT??????????flexural mode????????PMUT???????????Mo???繅??裨Si?????????????ScAlN??????ɡ?PMUT???е???????????????????????????????????????????????????????????PMUT???е??????????2.8  mm  x  2.8  mm??PMUT????????200  μm???????????13  x  13?????????????13  x 13 PMUT????????е???????????26.6°??

????С??????????ScAlN??PMUT

?????PMUT????????У?PMUT??????·?壨PCB??????????????????????????????????????6mm??PMUT??????????????????????????????????????????????跡????????????????????????????????跡??1.42 MRayl?????????????跡???????????????????????????????????????0.94 MPa/V??20 Vpp????1.79 mV/kPa??

????PMUT???????????3.96 mm????С??4 mm?????????У???????????赲???????????????????????????????????????????????15 dB?????????????????????????????????b?е???????????????о??У??о?????????????4 mm???????90 mm???????????????π??С??????????????????c?????

???????????????

?????????л??????????????????????У?????????????????У??????????2 ∼ 300 L/h??Χ????????????????С??±0.2%??????????С??1%???????2  L/h????????????????????????????0.3%??????ζ???????????6 L/h????????????????????1.5?????????????

TTUF??????У?

?????????о???????ScAlN??PMUT?????????π??С??????????????????????????????PMUT????С?????????????????????????????????????????????????????????????????????????0.94 MPa/V???????????1.79 mV/kPa??????????????????????????е?г???????1 MHz???????????????????????????·???????????????????????π??????????С??????????????????????о?????????????????????о???????????????????????????????????????????????в????????????????????????????????????????????????????????????4 mm?????????н??е????????????????????????о???TDC-GP30?????????????????????2 ∼ 300 L/h??Χ??????????????С??±0.2%???????С??1%??????????С????????????????????????????????????????????????????????Щ??????????????á?

?????????https://www.nature.com/articles/s41378-023-00518-y

?????????

?????????е????????????PMUT?????????????????-2022?桷

??????????е????????????CMUT?????????????????-2022?桷??