??????????????????????????????械????????????CMUT???????????械????????????PMUT????????CMUT???????????????谢??????PMUT????????????谢??????PMUT????CMUT??????芯??????????????谐??????????CMUT?????????璞�?????CMUT????????????????????????围??70-140 V?????????????CMUT????谩?

PMUT?????????????????????1???????????????????????????????????????璞�???????璞�?????????????????????绫�???????????????PMUT????????????械???????????????????PZT???????????AlN????PMUT????????????????????????????PZT PMUT???蟹???????????????????妫琍ZT???绯�???????????????????睢�????PZT???????????????????CMOS???????????????绯�?????????AlN??PMUT???懈????????????AlN PMUT???CMOS??????????AlN???????????????????????睢�?芯?????????????????????CMOS???????????锟�????Sc?????????????AlN??????????ScAlN??????????渭????????ScAlN PMUT???????未?????????

????????????????????????????????芯??????VTT?????芯?????????????Journal of Microelectromechanical Systems?????????????“Development of ScAlN PMUTs for Medical Applications”??????????????????????????????????????ScAlN PMUT????????????PMUT?????????????????芯???????????20% Sc/(Sc + Al)???????AlN?????????????????????????????PMUT?????????????PMUT?????????????校????????????????????????????????????????PMUT??????????????PMUT??????????芯????????????????????谐??????5.7 MHz???ScAlN PMUT???械??????????13 kPa/V????????????1.1 V/MPa??????????-?????????????????????????????ScAlN PMUT??????????????????谩?

???

????PMUT??????????3D?????????????1???????????瑁⊿i????????????????20%???Sc???????AlN????????渭绻�????Mo????伞???????渭?????????????????????PMUT???????????????PMUT????????婕�??????????????????????????????校??绻�???????????????????

?1 ScAlN PMUT??????

????????PMUT?????????????????????????????????????????????????????????位????????????PMUT????????????????危????????????????????????????????????????浠�????????????????????????????????????????PMUT?械?芯????????????????????ScAlN?????????????????????????????PMUT???????????????????????PMUT????????????

PMUT???????械???????2???????????????????瑁–SOI?????????????????????小??????dead space???????????20 µm??????X??Y????????????????????110 µm?????+?????????械??????????????????PMUT?????????20 µm????????????????????????????

?2 PMUT???????械????????????????????????????????绻�??

????

PMUT????Okmetic???????6???CSOI??????????????PMUT?????????????/????????????纬?CSOI???????3?????

?3 ScAlN PMUT??????????????

?4 ???????PMUT???械???????????

PMUT???眉???4????????????4????????????????PMUT???械???????????PMUT????????????缇�??SEM????????5?????PMUT?????????绻�??Ti/Mo: 150 nm????????绻�??Mo: 200 nm????????875 nm????ScAlN????

?5 ScAlN PMUT??????SEM???

????

?芯?????????PMUT?????械?????96??????????22?????????1??????????????15????????薪?????????????????96%????????卸???????????????????位???PMUT?????谐????????6?????位?????????PMUT???械?谐????????????????PMUT??????浠�??????Si?????????浠�???????????????浠�?????????????浠�????3%??6%????????????????????????????PMUT???????????????芯?????????

?6 PMUT?????6??缇�???????谐?????

PMUT???????械?????????????????Onda??AIMS III?????????貌???????????????????????PMUT???????校????PCB??????????????????????小?PMUT?????????械?42????????????????????????????屑?????????400 µm?????????Onda??HGL-0400???????????PMUT???胁??????????????????????????ScAlN PMUT??????????80 mm?????VTT?????????AlN PMUT???斜???????????????谐??????5.7 MHz???ScAlN PMUT???械??????????13 kPa/V????????????1.1 V/MPa??

???????????????芯?????????????????????ScAlN PMUT???????械???????芯?????????PMUT????????????校?????梅???????????????????????????ScAlN???????????????PMUT????????????????????ScAlN PMUT??????????????4??????????PMUT????????????????????????CSOI??ScAlN PMUT????????蟹?????????????????????????????械????????????????????????????????????????ScAlN PMUT???????????????????????????????????????????MUT?????????????ScAlN PMUT??????????????????????

?????????DOI: 10.1109/JMEMS.2023.3296159

?????????

?????械???????????????????-2023?妗�

?????????械????????????PMUT?????????????????-2022?妗�

??????????????谐?-2023?妗�??