???????е????????????PMUT???????????????????????????????????????????????????????????????????????????????????????????????3D?????2D?????????е???????????????е????????????MUT???????跡????????????/???????????????PMUT????????????С?????????????????????????????????????

???谺????и?????????≥ 10 MHz??PMUT?????????糬???????????е?????????????????????????????????????????????????????е?????????????????????????????????????????????????????????????????????PMUT?о?????????????????Smith???????????繅????PMUT??????????Green’s function??????????Ч??·????????и?????????????繅?????????????PMUT????????????????????????δ???????

?????????????????????й?????????????????????о?????????о??????????????????о??????????????IEEE Open Journal of Ultrasonics, Ferroelectrics, and Frequency Control?????????????“Design of Piezoelectric Micromachined Ultrasonic Transducers using High-order Mode with High Performance and High Frequency”?????????????????????PMUT?????????????????????????????n??????????PMUT???????????????????????о???????????????????FEM????????PMUT???????????????????????繅???ú???γ????????????????????FEM???????????????????繅???ú???????????PMUT?????????????????????????????????????????????????????PMUT????????PMUT????????????????????????????10.2????4.12????????????????????????????????PMUT????????PMUT????????????8.6???????????????????????????????????PMUT?????и??????????????????????????????????????PMUT?????о??й?????????????

???е???羧??????????繅??????????????????????PMUT??????????????й???????????壬????????????????????1??a????1??b???????

?1 ??繅????????壨????????????????a???????????b???????

???????о??У?PMUT????????????0, 1??????????????????λ????????????????????????????????????????????0, 3????г???????????0, 1????10???????????PMUT??????????ω²???????????????????????

?????????????????????????????PMUT??????????????????????????????????о???????????0, 3????????????????

????????????????PMUT?????о??????COMSOL Multiphysics?н?????2D????FEM??????????COMSOL?е?????????????2??a??-??c??????????????????????????????????????????????COMSOL??????á?????е???????????????????????Ч?????????????????????????е????????????????????????????????????????????????????????????????????????ToF??????????????

?2 ?????a????????????b?????????????c?????????????PMUT??2D????FEM????????

?3??a??-??c???????????0, 1?????0, 3?????????????????PMUT????????????S_Tx???????????S_Rx???????????S_RT??????????????????0, 1?????0, 3????

?3 ???PMUT??????????a = 50 μm?μ???????????????????

?4????????a = 50 µm??????????1 V?????0, 3????PMUT???0, 1????PMUT??????ο????????????SPL???????????е?ο???????1 µPa?????????????c0 = 1481 m/s????????????0, 1?????0, 3??PMUT??f0????3.18 MHz??18.60 MHz??

?4 ??0, 3????PMUT?????0, 1????PMUT???????????????????????

??0, 1??PMUT??????????0, 3??PMUT??????????????????PMUT?????????????P0?????5??a???????????PMUT??????5??c????????????????????????????????????????????0, 3??PMUT?????????????10.6 kPa?????0, 1??PMUT??4.96 kPa????2.15?????5??b?????????????練?????PMUT???????????????????練?????0, 3??PMUT?????????62.0 Pa?????0, 1??PMUT??5.88 Pa????10.5????????S_Tx??????10.2????????μ??PMUT??????????5??d????????????????У???0, 3??PMUT???????????6.53 µV?????0, 1??PMUT??0.76 µV????8.6????????????????PMUT?翹???????????????????????S_RT???4.12????????0, 1?????0, 3??PMUT????????0.368??0.140 pF???????翹????136??61 kΩ???????????????2.05???????????????????????4.12 × 2.05 ≈ 8.5??

?5 ????????????0, 1??????0, 3????PMUT??????????????

?????????????о????????и??????????PMUT????????????????????о???????????????????з???????????????????????????ο????????????n???????????????????????????г?????f0??λ???????A_s???????????S_Tx???????????S_Rx???????????S_RT????????????????????????PMUT????????????FEM????????????????????繅???ú???????????0, 1??PMUT???????????????0, 3??PMUT???????????????????????????????????????????Щ???????????PMUT???????????????з?????й?????????????

?????о???????????????????61874073???????????????????19ZR1477000?????????????LG-QS-202202-05??????????????

?????????DOI: 10.1109/OJUFFC.2023.3307085

?????????

?????е???????????????????-2023?桷

?????????е????????????PMUT?????????????????-2022?桷

??????????е????????????CMUT?????????????????-2022?桷??