?????????????????????????????????????????????????????????????????????????????????P+????????裨P-???????????????????е?????????????????????任???????硢?????????????Σ?????????????????????????????????????????????????Щ?о??????????????????????????????￡??????????MEMS?????????????????????о????????е????????????MUT????С??????????????????????????

?????????????????????????????????????δ????UAB?????????????????????PMUT-on-CMOS??????о????????????и?????????????????????????????????Sc_9.5%Al_90.5%N PMUT???ν?????a??????80 μm???????Σ???b??????60 μm x 40 μm??????Σ???c?????80 μm????Σ?????????????????????????????????????????????????25 dB??CMOS?????????????LNA????о????ɡ???ο?????????????????н??????????ONDA?????????????????HGL-0085??HNC-0200????????ο????????????????a??????b?????c???????????????????-234 dB re 1V/Pa??????1.9 V/MPa????-234.6 dB re 1V/Pa??????1.86 V/MPa????-238.3 dB re 1V/Pa??????1.22 V/MPa??????Щ???????????????PMUT-on-CMOS???и?????????????????????????????????????????????о??????“A Single-chip AlScN PMUTs-on-CMOS hydrophone”???????IEEE Sensors Journal?????

???????????PMUT-on-CMOS???????????????????????????Ρ????κ???Σ???PMUT????ЩPMUT??CMOS??·??????ɡ?Silterra?????????MEMS-on-CMOS???????PMUT?????????????????????????????

?1??a??????????????PMUT-on-CMOS???????????????????????????????? PMUT??????????繅??????????????R_X????????繅????R_X?????????????25 dB??CMOS LNA?????????????50 Ω????????????ɡ???????????С??6 x 10⁻⁴ mm²??????????????????????о??У???????????PMUT??????????1??a???????????????CMOS LNA????紙?????PMUT?????????????????????PMUT?????????????е?PMUT??????????

?1 PMUT-on-CMOS????????

?1??b??????????PMUT-on-CMOS???????????????????????PECVD??????9.5% Sc????AlN??Sc_9.5%Al_90.5%N????600 nm????????????????????Al?繅????????????繅???????200 nm??150 nm??????PMUT????1500 nm??Si₃N₄???????????????繅??????????????????

?о???????OPTEL?????ó???????????????5 mm??????????5 MHz??????????????????????????????????????????????????2?????ONDA?????????????????????????????÷?????????о?PMUT-on-CMOS???????????????????

?2 ?????????????????

?3????????????PMUT-on-CMOS??????????????????????dB re 1V/μPa?????????б??????????????????PMUT-on-CMOS??????????????????????1 MHz??10 MHz???????????Ρ????κ????PMUT??????????-234 dB re 1V/μPa??????1.9 V/MPa????-234.6 dB re 1V//μPa??????1.86 V/MPa????-238.3 dB re 1V/μPa??????1.22 V/MPa???????????????????????ONDA?????У???????????????????????????????÷???????檔????????PMUT-on-CMOS??????????????????????HGL-0085????缸?????????30 dB????HNC-0200?????С60%????15 dB??????????????PMUT-on-CMOS????????????

?3 ?????????????????????????

??С????????????????Ч?????NEP??????????????о????????????NEP????????????????????С?????????????????????????PMUT-on- CMOS?????????????????С??????????????????κ????PMUT-on-CMOS???????????????????????200 Pa??NEP????ONDA????????????????????????????????PMUT-on-CMOS?????????????????????????Ч????????????????????????????

???????????????о???????????????PMUT-on-CMOS?????????????????????о????????????1.9 mm x 1.5 mm???????????????Ρ????κ????PMUT??????CMOS-LNA???????????ɡ????????????н??????????????ONDA???????????????HGL-0085??HNC-0200????????????????????????о????????????????????PMUT-on-CMOS LNA???????????????????????????Щ???ò???????PMUT-on-CMOS???????????????????-236 dB???????????PMUT-on-CMOS??????????????缸??????????????HGL-0085 + ??÷??????????????-266 dB???????????????HNC-0200 + ??÷??????????????-247 dB??????????????????Ч?????NEP????PMUT-on-CMOS????????????150 Pa?????????

???????PMUT??CMOS??·?????????????????·???????????о????????????????????????·??????????????????μ?????????????????и????????????????????????????????????????????λ?á?

?????????DOI: 10.1109/JSEN.2024.3401455

?????????

?????е???????????????????-2023?桷

?????????е????????????PMUT?????????????????-2022?桷

??????????е????????????CMUT?????????????????-2022?桷??