- ????????????????????????????????????
- ??69???????????????γ?????г?????????
- ??????????????г?-2025?桷
- ??68???????????????γ????????????????
- ??SGX Sensortech???MEMS??????????崫????MP7227?????????
- ?????????????紫????????????????????????????
- ?????????????????????????????????
- ????????紫?????????????-2024?桷
- MEMS???????????????????????δ?????
- ??67???????????????γ????????????????
????3D?????????????????????PMUT
2024-07-07 09:53:16 ???????????? ?????0 ?????
????????CS?????????3D???????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????硢???????????о???????
?????????????????????μ???????????Silicon Austria Labs?????о????????????μ?3D????????????????????????е????????????PMUT???????????????????÷?????????????????????3D????е??λ???????????????2D/3D???????о??????“Theoretical Validation of a Single-Channel Air-Coupled PMUT With Multi-Frequency Operation for Compressed 3D Spatial Sensing”???????IEEE Open Journal of Ultrasonics, Ferroelectrics, and Frequency Control??????
???????о??????У??о??????????????????????????????????PMUT????????????????????ɡ????????????С???С?仯????????????????μ????????????????????????????????????????????ROI???????????????棬??????????????????????????????????????3D ROI?в??λ??????????????????????????о?????????????3D?????????????????????????????????PMUT????????
?1 ???????????PMUT????????????????
?о???????PMUT??Ч??·????K-Wave?????????????????????????????????в?????ж??????????????????????????ROI???????????????????????????????????????????????2D/3D????????????????????????????????????????嶨λ??????????????????????????
?2 ????LSQR??????2D?????????
?3 ????LSQR???????????3D?????????
?????о????????÷??????????????????????????????????÷??????????????????????????????????????????????????????????????????????????????????δ???????????????????????????????????????????????δ???о?????????????
?4 ????LSQR??????3??????????????3D?????????
?5 ???????????????????????
???????????????о????????????????????????????PMUT??3D???????????????????????÷??????????????????????????嶨λ???????????????????????????????????????????????·??????????????????????????3D?????????д??????????????????????????3D???????????÷?????????PMUT??????????????????????????????跡???????????????????????????????????????????Ч????????о?????????PMUT???з????????????????????Ч?????????????????PMUT??????о??????????
?????????https://doi.org/10.1109/OJUFFC.2024.3408138
?????????
?????е???????????????????-2023?桷
????????????PMUT ??????????
??????????AlScN PMUT-on-CMOS???о??????
??????????????????????PMUT??CMUT????
??????????
- ??????????й????о?????????????????????в???1????
- ?????????????MEMS??????????????????????????????????
- MEMS??????ToF????????????罻???????????
- ??????е????????????PMUT????????????
- ????MEMS???????????????????????
- ??VCSEL+??????????????????????????????????????????????????
- ????????????????PMUT??CMUT????
- imec??糬????????????????????????????????????
- ???????????????PZT?????/???PMUT????
- ???????MEMS?????????????????????3D???????
???????????
- 245???????????ScAlN PMUT?????
- 190??????????????????????????????????????????
- 140??????????????????PMUT
- 125??????????????????????????????????????????????
- 94MEMS?????????????????????????????μ????????...
- 81?????????????????CMUT????
- 72?????????????????????
- 56???????????????KNN????????PMUT?????????????????...