??????70?????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????У?????譚????г????????????????

??????????????????????????????????Chih-Hsien Huang???????Yeong-Her Wang????????????????????????????????-????????????PZT????????????????????е????????????PMUT??????????????г?????????????????о??????????????????????PZT????????????????????????????????г???????40 kHz????????PMUT?????????????PMUT???е??????????????????????г??????????????о??????“Development of an Air-Coupled Piezoelectric Micromachined Ultrasonic Transducer Using Sol-Gel PZT Thin Film for Fast-Prototyping”???????IEEE Open Journal of Ultrasonics, Ferroelectrics, and Frequency Control??????

????????????????-????PZT?????PMUT???????о???????????????PZT??????PMUT?????????????????о???Pt??PZT???????????????????????????????????г????????????????о??У???????????????20nm Ti??250nm Pt??????Si??????????Ti??????????????????????-??????????PZT???????????????????-????PZT??????????????о??????????????????40 kHz PMUT????????

???????-????????PZT????????????

?????????PMUT???

?????-????PZT???????????PMUT???????????????????????о?????????????????PMUT???е??????????о??????????k-Wave?????????????PMUT???е??????

??????-????PZT??????????????PMUT?????????

?о???????????????????600 ~ 775 μm??PMUT???????????????????????У?????10 V_pp??????????725 μm??PMUT?????3 cm????????????4.42 Pa??????????40.48 kHz??????k-Wave?????????????725 μm?????-????PMUT?????????????????????11 × 11????PMUT???????3 cm?????????????365.62 Pa?????????????PMUT???е??????????????????????г??????????

PMUT?????????????????

11 × 11????PMUT???н???棨???????3 cm???????????????PMUT????725 μm?????????1700 μm??

?????????????о???????????????-????PZT?????????????PMUT???·????????????????????????????豸?????PMUT???г?????????????????????????-??????????PZT????????????????????PZT?????d₃₁?−33.9 pC/N??????????????????????PMUT???硣????????????PMUT????????????????????????????????У?????40.48 kHz????50 V_pp???????????????725 μm??PMUT???????3cm??????????????4.42 Pa??????????о?PMUT???е???????????18.45 mm × 18.45 mm?????????????11 × 11????725 μm PMUT???е?k-Wave?????????????????????PMUT???????3 cm????????????????365.624 Pa??????????????ó????????????????????????????????????????????????????????????г??????????????????????????????????????????????????-????PZT????????PMUT???????????????г???????е??????

?????????https://ieeexplore.ieee.org/document/10521570

?????????

?????е???????????????????-2023?桷

?????????е????????????PMUT?????????????????-2022?桷

??????????е????????????CMUT?????????????????-2022?桷??