??????о??????????????????????????????С??????о????????CSP, Chip Scale Package?????????????????MSA330??MSA330??????С????????????????????????????1.075 mm x 1.075 mm x 0.60 mm ????x??x?????

MSA330???????????????????????wafer level bonding????????????TSV, Through Silicon Via)????????????????????????????е????MEMS?????????????????ASIC????????????????????????????????????????????????????????????????Ч????????????????????MSA330???????????????????WLP???TSV??????WLCSP??wafer level chip size package?????????????????????????

MSA330?????????1.075 mm x 1.075 mm x 0.6 mm, ????????????С????????????С??30%?????????????2 mm x 2 mm???????????С??70%?????????????????0.6 mm??????0.2 mm????????????????????SMT???????0.5mm, ????????????????С?????MSA330???????韁?????е??????????????????????????????????????????

MSA330???????????14bits / 12bits / 10bits / 8bits????????I2C / SPI????±2g / ±4g / ±8g / ±16g?????????????????Χ???????ж???????????????????????

???????2015?????????????????????????????????2015?????????????????

??????????о??????????????

?????????2007????????????????????????????????????й?????????????????????? MEMS ?????????????????????????????????????MEMS???韁???????????????????????????????????????????????????????????????????????????????λ?????????????????????а??′?????????????????????www.MEMSensing.com