Safran Colibrys??????????????????????????????????MEMS???????????????????????????????ù????????????????????????????????????????????????MS1000???????г????????????????????

MS1000????????μ?MEMS?????·????????????????????????????????????????????????????VRE????????????????????

“MS1000???????????????????????????г???????????????????????????????MEMS?????????????á????MS1000?????н?????????????????????????μ???????Safran Colibrys???????????ο??????” Safran Colibrys????????Marco-Carlo Rossi???????

MS1000???????Safran Colibrys??????????????????С??????????LCC20??????????????g???Χ??????2g??10g??????5g??30g??100g???????????й????

??????Safran Colibrys???????????磬???MS1000?????????????????????

?????????

??????Colibrys VS1000??м??????

??mCube?????о??????WLCSP??MEMS???????MC3672??

??Sensonor?????MEMS????????飺STIM210??

??????SCC2000??У?X??Z?????????3????????

??Silicon Sensing??????????Z?????????2??????????CMS300??

?????“??”??????о????????????????????????????????

????????????????г?-2016?桷