InSense??????????10??о???????????MEMS????????????3???????+3????????+3????+?????????

???????????????InSense????е???????????????λ??????????MEMS??????????????????????????????????MEMS???????????????????InSense???????????????????????????Intel??????MEMS???????????????????????InSense??MEMS???????е?????й??????????????????????????MEMS?????????????м???????????????????????????????MEMS?????????????????MEMS??????????????????????InSense????????????????????????????????New Enterprise Associates?????????VC????Walden International????????????????????

?????MEMS?????????????????????????????????????г??????????????????????????????????????MEMS?????г???????????????MEMS????У????MEMS???????????????о?????????????????????????Щ???е?????MEMS??????????????????????????????????????????????????,?????С????????硢?????????????????????????Щ???о???????????μ????

????????????????????о?????????????????????к??ж??MEMSо???ASICо?????Що???????????????γ???????????????????????????????????????У??????????????????????????????????????????????????????????????

??Щ???????????CMOS????????????MEMS???????????????????????????MEMS ?????????????????????CMOS?????????????thermal budget?????????CMOS???????????κθ???450??????????

InSense????????????????????electroplated copper??e-Cu????????????????? 450????????????ASIC?????????γ?MEMS??????????????????????ɡ??????????????????????????????MEMS??????????????????????

?????????ASIC?????????e-Cu????????????????????????????????????????????????????е?????С???硣????????????????????????????????????????????о??????????????????????С?????Ч??????????????????????????

InSense????????е?????????????ASIC?????????????????CMOS???????????????

InSense??????????2016???????????????????NSF???????749,942????????SBIR??????????????????????Ρ???NSF???????????????????????????????????Principal Investigator????InSense???3????????й??CEO????Noureddine Tayebi??

InSense?????????????????????????

InSense???3????????й?Noureddine Tayebi

InSense?????????????????????й????????????????????????????????????????MEMS???????InSense????????10??о???????????MEMS????????3???????+3????????+3????+????????????????????????????????????2019?????????????????????????

?????????

??MEMS??????-2018?桷

??mCube?????о??????WLCSP??MEMS???????MC3672??

??mCube?????СLGA??????????MC3635??

??????????г?????-2017?桷

??MEMS??????????г??????-2018?桷

???????????г?????-2017?桷

??ADI????6??MEMS???????????ADIS16460??

??????Colibrys VS1000??м??????

??Silicon Sensing??????????Z?????????2??????????CMS300??

??????SCC2000??У?X??Z?????????3????????

??Tronics???????GYPRO3300??

??Epson Toyocom?????????X3500W??

??Sensonor?????MEMS????????飺STIM210??

??????3??MEMS???????MAX21000??