???????????????????????????????????μ???SMI230?????????SMI130??????汾??????????6?????MEMS?????????????????????????????????????????????????2019??7?·??????????

???????μ?SMI230???????????????????????????????????????????????????????????????????н??????λ????????????????????????????????ж????????MEMS???????????????????????????????????????????????????????????????????????Щ?????????????λ?ò???

SMI230????????????м?????1??3??MEMS????????????1??3??MEMS???????2????????????16????????????????????????????????????????????????У??????????????Э????С?SMI230????з???????????????????????????????????????????0.02°/s/√Hz (rms)???????????????0.12 mg/√Hz (rms)??????????????п?????????????

??MEMS?????????????????????????????????????????????г??????????????????MEMS??????????????????????г???????

?????????????MEMS????????????????1??????з???????????????????????????????????????Ч?????????????????????й??????????????????????????????SMI230?????????????????壬?????Щ??????????????????????????

?????????

??????Τ??9??MEMS???????????HG1120CA50??

??????Τ??6??MEMS???????????HG4930CA51??

??ADI????6??MEMS???????????ADIS16460??

?????iPhone X?е????6??IMU??

??iPhone 6??6 Plus?е?6??IMU??InvenSense MP67B??

??mCube?????о??????WLCSP??MEMS???????MC3672??