????裨SiC??????????????????MEMS????????????????????Щ?????????????????????????????й???????????????????SiC??????????е??????????????????譚?????SiC MEMS??????

????????????????????????????????????????????????TU Delft????Sten Vollebregt???????????????????з??SiC??a-SiC???????????CNT???????????????????????????????HAR????????????????????????????????HAR CNT???п?????????????????????????CNT???о????????????????????LPCVD??a-SiC??????????????????SiC-CNT?????????MEMS?е??????о????????????????????????ò????????MEMS??????????????????????????????????????????????????????????????????????????????????????????????????????a-SiC??CNT???е??????????????????????????????SiC-CNT?????MEMS?????????????????????????е??????????書???????о??????“A high aspect ratio surface micromachined accelerometer based on a SiC-CNT composite material”???????Microsystems & Nanoengineering??????

???о??????SiC-CNT??????????????1????????????SiO₂??????????????????????????????赲????????????????????????е??????????????????????????????????????CNT???????????????????????Aixtron Blackmagic???????????????CVD??????CNT???С????????????????????????????????????????????????????????????????????????????????Fe???????????????CNT???????????

CNT??????????????1a??????1c?????????????????е????????VACNT?????е???棬????CNT?????????????????????????????CNT???????5????????????????96.3 μm?????2???????????????????????????0.96??96.3???CNT??????????VACNT???б?a-SiC??LPCVD??????1b?????????????????1d?????????1c??1d???????????????????CNT?????????

?1 ???SiC-CNT???????????????????

?2 ???????VACNT???е?SEM?????б?????

???????SiC-CNT???????????HAR????????????о????????????????????????SiC-CNT???????????????????????MEMS???????HAR??????????MEMS???????????????????????Ч??????????????????????

??????????MEMS??????????????3a??????????????????????????顢?????????????ê????????????????︽???????????飩?????ê??????????????????ê???????????????????ê??????н?????????????е?????????????

?3 SiC-CNT?????MEMS??????????

SiC-CNT?????MEMS???????????????????4?????

?4 SiC-CNT?????MEMS??????????????

???SEM???????????SiC-CNT????????????????????5a??????5b???????????С??5c???????????е???д????????п????????????????????????????з????????????5f??????????????????90°??б???????????й???′?????

?5 ???SEM????????SiC-CNT?????MEMS??????

?????????????о?????????????и???о?????????б????????????Agilent 4294 ?????跡?????????MEMS?????????????????6?????

?6 SiC-CNT?????MEMS?????????????

?о???????????????SiC-CNT?????MEMS???????????????????????????????????????????????????7a????????????????????????????????????????7b?????????????????7d?С?????????????????R²???97.38%??????????????б???????????????????0.14 fF/g??

?7 ????????????ü????

???????????????о??????????????LPCVD a-SiC??VACNT?????????SiC-CNT?????????????????HAR-SiC?????????????CNT?????????????????????????????????CNT?????????HAR?????????????塣???????CNT?????????a-SiC????????????????CNT??岢????????????????????????????????SiC-CNT????????絼????a-SiC???????10⁷????SiC-CNT?????????????????????TCR????−315 ppm/K??????CNT???????SiC-CNT/TiN??????????????4.63 × 10⁻⁴ Ω cm²??

?о?????????????????????MEMS????????????SiC-CNT?????????MEMS?е???á???????????????￡?C-V?????????????????????SiC-CNT???????????????????????????????????????169.61 GPa?????????????????????????????????????????????????????????????0.14 fF/g????????????????о???????????????????????е????????????????????????????ASIC???????????о???????

?????????https://doi.org/10.1038/s41378-024-00672-x

?????????

?????????CNT?????????г?-2023?桷

??????????裨SiC????????????-2022?桷

??TDK InvenSense????????????IMU??IAM-20685?????????

??????MEMS????????????IMU??SMI240?????????

??????MEMS????????????IMU??SCHA634???????????