???????????????????????????????????????з?????????????????á????е????????????????????????μ??????????????????????????и???????????С???硣

???????????????????????п?????????????????????????????????plano-concave????????-?????F-P????????еMEMS???????????????146 V/g????F-P??????????????????????????侵???????????????????????????裨SOI????????辧???????ɡ?????????????ù??еMEMS??????100~200 Hz????Χ?????2.5 ng/√Hz????????????λ??????????6.2 fm/√Hz????500 Hz??-3 dB?????????±4 mg???????Χ?????????????????????????????????????????????????????о????????????????????÷?????????????????????????????????????????2.5 ng/√Hz???????????о??????????????40 mm????????????еMEMS??????????????3????????????????????????????о????????????????о??????“An optomechanical MEMS geophone with a 2.5 ng/√Hz noise floor for oil/gas exploration”???????Microsystems & Nanoengineering?????

?????о???????????еMEMS????????40 mm??????45 mm???????75 g????????????????????MEMS????о?????????????????????????????????????????????????????????????????????1a???????F-P??????????????????????????????????侵?????????????????????1b??????????????????У????????????????????У????????????????????????

?1 ???еMEMS????????????

?ù??еMEMS????????????????????????????????????????????λ??????????F-P?????й????λ???????????????????????????????????????????????????𝑤₀?????????1c??????????еMEMS????????????????????????????????????????????????λ????????г??????~1550 nm??????????1d????

?????????????????????????о????????SOI??????辧??????蹤?????????F-P????MEMS?????????????е?????2?????

?2 ???е??????MEMS??????

????????????????????????Ч????????????3a????1550 nm????????????????1 × 2????????????????·?????й?·??ο???·????????????·???????￡?????????????????????????й??????????????CIR??????F-P?????????????????????CIR????????????5 Hz??????????????????????Thorlabs??PDB435C-AC?????????ο???????PDB?????????MEMSо??????PZT???????????????????????????????????????λ???????????????????еMEMS????????????о??????????У???顢?????????????????飬????????3???4???5?????

?3 ???еMEMS??????У????

?4 ???еMEMS???????????

?5 ???еMEMS?????????????????

???????????????о???????????????F-P??????????????еMEMS??????????????????2.5 ng/√Hz???????500 Hz????????Χ?±4 mg????Чλ????????6.2 fm/√Hz??????F-P????????????????е???????????????????????????????????????????????/??????????????????15 ng/√Hz?????2.5 ng/√Hz???е????????????????????????еMEMS???????и??????3???????????????????????????

?????????https://doi.org/10.1038/s41378-024-00802-5

?????????

????????MEMS????????????IMU???????????-2024?桷

??TDK InvenSense????????????IMU??IAM-20685?????????

??????MEMS????????????IMU??SMI240?????????

??????MEMS????????????IMU??SCHA634?????????

????????MEMS????????????IMU???????????-2022?桷??