??ó?????????GUW?????н????????SHM???????????????????????????????????????-???????壨FML?????????????????????о?????????????????????????????????FML??????????羧?????????????PWAS????????????????100 kHz??Χ????沨??????????FML?е??????????????跡????????Щ??????????????????

????MEMS?????????????????????е????????????MEMS????????????????????kHz??Χ????????????????GUW?????????????????????????? “MEMS??????”?????????????????1???????????????????????????????GUW???????λ????????????????????MEMS???????????????????100 kHz??GUW???塣

????MEMS?????????С?????2.2 mm× 2.2 mm × 410 µm??????????FML??????У??????????GUW?????????????????MEMS??????????Χ??????????????跡????????????????????GUW??????????????á??????????????Щ?о??У???δ??MEMS???????????????г????????н????????????о???

?1 MEMS????????????????г?????????

?????????????????????1???????????????Technische Universität Braunschweig???????÷?????Universität Bremen?????о???????????????????????MEMS??????????????о??????????????????GUW??FML???????????????????μ?MEMS??????????о??漰????ж?????г??????????г???????з?????????????????100 kHz????????????????????????????ü???????????????y?????????????????????MEMS?????????????????е????????????????????????????о??????“MEMS vibrometer: Dynamic modeling of multimodal inertial transducers”???????Scientific Reports?????

MEMS??????????????

????????1-DOF??????-????-??????????????????г??????????????????????????г??????????????????????1-DOF????-????-????????????????????г?????????2?е???????????

?2 ????г??????2D??????????????

??г????????????????????????????????????????·????????????GUW??????????????????????????????????е????????????????????????ε?????￡??????????????????????????????????????????????????????????г???????????????????????????????????3????????????????????????????

?3 SOLIDWORKS?е????г???????????3D???

MEMS????????????????????????????????????????p???p+????????????????и?·???????γ?????????????????????????????λ??????????е?p???????????в???Щ???????λ???????????ο????·??????????γ???????????????????RA???????????????????RB?????????·???4??????????????????????

?4 MEMS???????????

г??????????????????????????

??????????????????????????????????о?????????ANSYS 2022R2??ANSYS GmbH???????????????????????о?????????ANSYS?????????顣??????????????????????????ANSYS????????顣

?5 ????????????г??????????λ????????1??3????λ????????????

??????????????ü??????

??????MEMS??????????????????????????о???????? 6???????????y?????????????????????MEMS???????A????????????????B?????????????????C????????????????????????????D????PD200??PiezoDrive??SI Scientific Instruments GmbH??????????????г????????λ?????????????E-H????SmarAct GmbH??PicoScale????????????????????????????????????????????????????????????? x??y??z ????????????????λ??λ??????????λ??????????????????????????????????·??????????饗I????DAQP-BRIDGE-B??DEWETRON GmbH??????????????

?6 ????????????????????????????

?7 ???????????????????1???2λ?????λ?????????????????????

?8 ????????????????????????????????????????????????

????????????????????????????????MEMS????????????????GUW?????λ????????????г????????г?????????GUW????????????г??????100 kHz?????????????GUW??г??????С??

С??

?????????MEMS???????????????????????????λ???????????????????????????????????????????????????????????????????г???????????????????????????????????????????????????????????????г??????????????????????????????????????????????????????????????????????е???????????????????????о?????????й????α??????????????????????????ò??????????δ????????У??????о?????????????????????????????в??????????????????????Щ????У?λ?????????????С???????????

?????????https://doi.org/10.1038/s41598-025-90976-3

?????????

????????MEMS????????????IMU???????????-2024?桷

??TDK InvenSense????????????IMU??IAM-20685?????????

??????MEMS????????????IMU??SMI240?????????

??????MEMS????????????IMU??SCHA634?????????

????????MEMS????????????IMU???????????-2022?桷??