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???CSME?????????+MEMS?????????????????
2013-02-22 13:25:23   ????????   ?????0   ?????

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??????????MEMS??????????????????????????????CMOS??·??????????????????????????????RTC??real-time clock?????μ?????±5ppm??????????0.4μA???????μ???MEMS??????±5ppm??2??3μA??????????????????CMOSо?????0.18μm????????????????????????1.4mm×1.0mm×0.5mm??

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