????????????????????????????????????????????????????????????????????o????????ù???????????????????·?Χ??HT-MM900A???????????MEMS???????????????????μ????????ò???????????????2013?????????????IMS?????????

HT-MM900A?????????????μ?MEMS?????????????????????????????????????????????????С????????????????????????????ü?MEMS??????????????????????硢?????????????????????????á?HT-MM900A????1mhz??110mhz????????-55°C????125°C????????????±25ppm??????????2.5mm×2.0mm??

?ù??????????Gregory Smolka?????“?????????????????????ü?MEMS???????????????????????????????ò???????????????????????????????MEMS???????????????????????????MEMS?2????????洦??”

?ò???????????￡?????Χ?1MHz ~110MHz?????·?Χ?-55°C??+125°C???????????+/-25ppm????????50000g???????70g??????????0.1ppb/g???????????????????????