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2015-10-23 07:10:14 ???????? ?????0 ?????
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??????????????????Nature Communications??????棨10??19??????
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- xMEMS?????衰??????????????豸????????????
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- 2.6KMEMS???????????????????????δ?????
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- 525??軔???MEMS?????????????Adhawk Microsystems
- 519MEMS Drive????????????????MEMS??????????????...
- 219??????????????????MEMS????????????????????
- 202????λ?????????Tip-Tilt-Piston????MEMS???????
- 147????MEMSг???????????????о?