???????????????????????????????????King Abdullah University of Science & Technology??????KAUST?????о????????????????????????????????辧???????????——MEMS???????????о???????????MEMS??е???????????????????и?????????????????÷??????????????????????????????????????????

???MEMS??е????????????0??1???

?о??Saad Ilyas?????“MEMS??????????м?????????????MEMS???????????????辧???????MEMS????????л???????????MEMS???????????????????‘?????’????????????????????????????????????????????——?????????Щ???????????С??????????”

???????????п??е?λ??MEMS???????????????о???????????????????????????????????????MEMS??????????γ????????????????????????????

Nizar Jaber??????о??Mohammad Younis??????????????????????????????????????????о???????????

“??????????????????”Jaber???“????????MEMS????г???????????polymer microbeam?????????????????????????????????????????????????????????????????MEMS????????????”

?????????????????????????????????????????????????????????????????????????????????е????????????

?????????

??MEMS??????-2017?桷