??????????????????????????Binghamton University???????????????State University of New York?????о????????????????????????????????????

???????????е???????????Sherry Towfighian???о???Mark Pallay?????????????MEMS????????t????????????????????????

“??????????????MEMS????????????????????MEMS????????????繅??”Towfighian???“??Щ?????????С?????δ???????????????繅??????????????????????”

???????繅??????????????????繅?????????????????MEMS?????????????????Щ?о????????????繅????????????????????繅?????????????????????????????Towfighian???????????????????????????

????????????????????????????????????????繅?????????????????????????繅??MEMS????????????繅??а??á?????????????????繅??磬???м??????繅????

Towfighian???????“????MEMS??????????????????繅??????????????????????????????м?繅???????????????”????????????????????????????繅????????????????????????????????????ú??????????????????????????

“?????????????????????ζ??????????????????????????”Towfighian???“???????????????????????????????????????????????MEMS?????????á?????????????????и??????????????????????壬?????????????????????????????в??”

???????“???t????????????MEMS????”???о????????????????????????????????

?????????

??MEMS??????-2018?桷

??5G???????RF????????????

????????????????????????-2018?桷

???????RF?????????????????????-2017?桷

????????????????-2018?桷

??iPhone X?и??LTE????????飺???AFEM-8072??

??Qualcomm?????802.11adо??飺QCA9500??

?????????????????RF????????????????????-2017?桷