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?????????????AFM????MEMS?????

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???薪?AFM??????????????????????L?蔚????芯?????????????????????????????AFM?????伞?AFM??????????H=9.5 µm ±5 µm??

??霉?????????AFM????????MEMS?芯??校??AFM????????MEMS????

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?芯???????MEMS????????????芯??械???????AFM??????????????????????MEMS?????????????????????????200 pm???小?????0.1 Hz??????????MEMS?????????????????0.2 Hz???????谐???60 pm???????????蟹???????????械??????蟹?????3.7 nN??

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??????????谓??????AFM??????????MEMS????????????????????楗桺DMS???????????????????????????????

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????MEMS???????????????????芯?????????AFM?????????MEMS??????????校???????????????????????600 µN???????????9.5 µm?????????????????????????1 Hz??????校?????????????0.3 nN/√Hz??4 pm/√Hz??????????????????

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??MEMS??????????薪????????AFM??????????????????????????????10 nm???????????????????????

????AFM????MEMS???????????????

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Bruker????????xProbe

?????位????????????????AFMWorkshop??????MEMS?????????????AFM???????????MEMS???????位????????????魏??????????AFM??

???????????????????????????????Integrated Circuit Scanning Probe Instruments??ICSPI?????????????????????????芯?AFM???????nGuage AFM????AFM?????????????????????????????????1 mm x 1 mm??MEMS芯??小?

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??MEMS?????????????2019????????????