????????????????1????????м???????????Bosch Sensortec????????????1????????о?????????????Hahn-Schickard??????????????????????????MEMS??????????????????????????????????????????MEMS???????????

?????Я?????“???????”??????????о????????????????????????????????MEMS???????????

δ???????????y?????????????????????????????????????????????????????????????????????????????????á??????????MEMS??????????Hahn-Schickard??Bosch Sensortec????????????

?????????????????MEMS???????????С????????????????????????“???????”?????????????????????г??????????μ???e?????

????????????????????????????к????????????Bosch Sensortec?????????????MEMS????????????????????????MEMS???????????????????з?????顣??????1????-????????????о?????Hahn-Schickard????MEMS?????????С?????????????ж?????????飬????1???????-???????????????????????

“????????????Bosch Sensortec????????????????????????δ??????????MEMS??????????κ?????α?????????Hahn-Schickard?о????????????????Ρ?”?1?Hahn-Schickard?о??????????????????Georg H. Endress????Alfons Dehé?????

Bosch Sensortec?????й?Stefan Finkbeiner????????“?????????о???????????????????????????????????Hahn-Schickard??????????????????MEMS???????????????????????????????????????????????????????????????????????г???λ?????????δ?????????????????????????”

Arioso Systems?????MEMS????????

2022??4?￡??????????Bosch??????????????MEMS????????????Arioso Systems???????Bosch Sensortec????????Arioso Systems????????Fraunhofer IPMS??????????о??????о????????2019???????????????????????????

Bosch Sensortec??MEMS????????????????????????豸???????С?????????????????????????????????????????????????????Fraunhofer IPMS??????????о????????????????????NED????????????????????Bosch Sensortec??MEMS??????????????????????????????????о??????????????????????????????????Ч?????120 dB?????????

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??MEMS???????????????-2022?桷

??MEMS?????????????????????-2022?桷