???????????CMOS???????????????????BAW?????????????????????????????????С???????????????????????AlN????BAW???????????????????????????????????????г???5%???????5G?????????????

?????????????????????人?????????????о???????????????Al_0.8Sc_0.2N???????????г??????FBAR?????????????RF???????????????????????????Al_0.8Sc_0.2N????????????г?????????14.5%??K_eff²????62???????????FOM??????г?????????????????TCF???−19.2ppm/°C???????????????????????????????????????????????4.24 GHz??-3dB?????215 MHz??????????IL???1.881 dB?????????32dB?????????????????5G??ε???????????????????????·??

???????о??????У?????????籡???????г????????????裨Si??????725 μm??????????????ɡ???????????????Mo????120nm??37nm ??????????????????繅????????繅???衣???????????????????CMOS??????????????????AlScN????FBAR??

????Al_0.8Sc_0.2N?????FBAR

???????AlScN??FBAR??????????

?????????о?????????????????????????????SEM???????·???????????????8?????????????4??????г??????4??????г????????????????????????37 nm??Mo?????????????????г???????????г???????????г???????????????????г?????????????????????Mo????????????????????????????????????4.24GHz??-3dB?????215 MHz??IL?1.881dB?????????32dB??????????2????????С??-12 dB??????????κθ?????·???????????50 Ω?跡???

????Al_0.8Sc_0.2N??FBAR??????????

?????????о????????????????Al_0.8Sc_0.2N??FBAR?????????MEMS?????????????FBAR?????????CMOS???????????????????????????????????????????????????????о??????Al_0.8Sc_0.2N??????????????????????????????????????Al_0.8Sc_0.2N??????????c???????????FBAR???д??e₃₃??2.08 C/m²????14.5%??Keff²????62??FOM?????????о???Al_0.8Sc_0.2N??FBAR??????????????????г???????????????????5G??????????????????

?????????https://www.nature.com/articles/s41378-022-00457-0

?????????

??5G???????г?-2022?桷??