?????3D?????ж??????????????????е????к??????????????????????????????????з?Χ???????????????????????????????????????????辧??????????????????OPA??????????????????????????????????????????????????????Χ???г????????

?????????????????????????????????-????????????Univ. Grenoble Alpes?????о??????????裨SiN??????????????????MEMS????????????????????????????????????????????????ɡ???????????????905 nm??????1???????????????????17°??Χ????????????裬???????????·?????????????????????????????????????????????40°???Χ??????????????????????????????????MEMS????????????????????????????????????????????OPA???????????LiDAR?????????????????о??????“Active optical phased array integrated within a micro-cantilever”???????Communications Engineering?????

?1a??????????MEMS?????????OPA??3D??????16???1D-OPA?????????????????4?????????????λ = 905 nm?1??????????ù?????????????????????????????d?3 µm??OPA??·???????????貨???????????~1 dB/cm?????????????????????????????~ 5 dB????????·???????????????4??1 × 2?????·?????????·?????????~ 0.1 dB???????????????????????16?????????????????????е????λ??????λ????????TPM?????е????????????????????????20 nm?????????????ù?????????????????????????????????????????????????8 dB???????????о????????????????????????OPA??·???????????????????????????????????У???????t_CL = 11 µm???????w_CL = 400 µm????????l_CL = 2900 µm?????1b?е??????????

?1c?????????????????????檔?1d???????????TPM??????????????????SEM??????????????????????·?????????SiN????????????????????????????TiN?????????????????????????????????????????PZT???1e????????????????????????200 mm?????

?1 ??????MEMS???????OPA????????

??δ??PZT????????????????￡??о?????????????·???????2a???????? OPA???????????0????????ϕ₀??????λ???ϕ = 0°???????????ϕ???????Δϕ = 1.2°?????2b?е?????????????????????????????1.25°???2c???????−10° < ϕ₀ < 10°?????????2°?????У???????????OPA????????????????????????????ϕ₀???

?2 ????????????OPA???????

??????θ?????????????2d???????????λ????????????淨???θ = 20°???????????????Δθ = 0.65°?????????????????棨???????????????????OPA??θ????????????2e???????????θ = 4°??????Δθ = 0.15°???????????????????????·????????????????

?3 ?????????????????2D???????

????????????￡???????????θ???Χ???PZT???????????????????????￡?????????????V_PZT(t) = V_max(1+sin(2πft))/2???????????г??????????????θ????4a????????V_max = 4 V????????仯????Δθ???????f??????

?????????????f₀ = 1.52kHz???????4b?п???Δθ??V_max??仯?????????V_max = 6 V??Δθ ~ 20°?????????????????f = 0 Hz???1?????????f₀?1????Δθ???????42°?????V_max?16V????????????PZT???????????????OPA?繅???????о??????OPA??????????????衣?4c??????????????????????????????????

?4 ???г????????????2D???????

????????????????????????????????????1D-OPA????????·???????о?????????????????????????????????????й???????MEMS????????????????????????200 mm?辧??????????????????OPA????????????????????????????????????Χ???г??????????????????????????????????????????OPA?????????????????????????????????????????????????????????????·????????????????????????????????????????????????????????????

?????????https://doi.org/10.1038/s44172-024-00224-1

?????????

?????????LiDAR?????????г?-2024?桷

?????????????·??PIC?????????г?-2024?桷

?????????????LiDAR????????????-2022?桷??