???????????????????????豸?????С????????????·??IC???????????????MEMS?????????????????????????Engineering?????????????о????3????????????ег??????MEMS????????????????????????????μ?????“MEMS Huygens Clock Based on Synchronized Micromechanical Resonators”??

???????????Christiaan Huygens??????????·???????????????????????????MEMS???????????????????ɡ?

?1 ??a???????????????????b??MEMS????????????????c??MEMSг???????????????d??????MEMSг???????

?2 ??????????????

?????о??????????MEMS?????????????????????????????????????????仯????????1?????19.3 ppb???5.17 ppb???????3.73???????????????????????????????????????????????6000????????1.6343 × 10⁵??????30.9 ppt??

????????????????о??????????????????????????????????MEMS???????????????????????????г????????????????????????????′??????????????????MEMS??????????????Ч???????????? 2.85 mW∙°C⁻¹??

MEMS??????????????????????

???о??????????????????MEMS??????????·??????????????????MEMS?????е???÷?Χ??????????豸???????С????????????????????????????????????????????????????????????

???????????????????????????????????????о????????MEMS???????????????????δ??????????????????????????????

?????????https://doi.org/10.1016/j.eng.2023.12.013

?????????

??TDK InvenSense????????????IMU??IAM-20685?????????