???????????????????????????????????????MEMS???С?????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????LCг???·????????????

?????????????????????????????????University of Waterloo?????????????????Benha University???????????????University of Nantes?????о?????????????????????г???????????????????????????г????????????????????????????????????????????????????г???·??????????????????MEMS???????????Ч???????????????о??????“Resonant Drive Techniques for Electrostatic Microelectromechanical Systems (MEMS): A Comparative Study”???????Sensors?????

????MEMS?????

?????о??????MEMS????????????????繅?????????????????????????????????????????????1??????????????PiezoMUMPs??????????????????У?????·?????????????

?1 MEMS?????????????SEM?

???????????????о???????????????out-of-plane????????????????????????????????糡???м????????????????????????????????????е?????????У???е??????????MEMS??????????????????а???????????????VDC???????VAC??????????е繽??????????????????????????????MEMS???????????????????L?????LCг??????????????Ч??·???2?????

?2 ?????????Ч??·

г????????????

?о?????????????????г????????????·??????????Щ??·????????????Щ?????????????????????????????

г????????????????????3?????MEMS??????????繅?????????????????????г??·?????????????????????????LDV????????????????λ???????????????Liquid Instruments??Moku:Pro???????????????????????·?????????????????????RLC??·??????????????

?3 ????ú????г?????????????????

г?????

?о??????????????????г????????????????????????RLC??·???г?????f_e????????????????????MEMS????????ег?????f_m????μ???繽??????

?4a??????????I???????????V_AC?μ?????????????????V_AC=10 v????ü?????????г????????𝑤_RMS=189 nm?????λ???????????????????????????λ?????????

?4 ????????MEMS???????2.2 mH??е?г????傷???μ?????????????????

???????

???????????????????????????????????????????????RLC??·???г?????????f₁≈f_e?????????????????????????????????MEMS????????ег??????f₁±f₂=f_m???????????????

?5 ????????????????е?????

?????????￡??о?????????????????I′??????????????L_¹=60 µH??L₂=10 µH??????????????????????г????????f_e=6.8 MHz??f_e=13.25 MHz?????6?????

?6 ??????????????I′????????λ?????????

???????

??????????????У??о???????????????????????7??????????????????f_e??RF???????????f_b?????????????

?7 ????????????????????е?????

?о??????????MEMS?????I′?????????????????????????μ??????????????????????????f_e=6.27 MHz??f_e=9.11 MHz??f_e=13.25 MHz??

?8 MEMS?????I′?????????????????????????????????????μ???????

???????????????

????????????????????????????????б????о???????????????????MF??????????????????????MEMS??·???????????????????????λ?????????????Ч?????????????????????????????г???????????????????????????Ч?????9???????

?9 ?????????????????????????

С??

???????????????????MEMS????????????????????о???????г?????????????????????????о?????????????ο?????????????????????ú??????????????????????????????????????????????о???????????????????????????????MEMS???????г????????·?????μ?????????

?о????????????>1 MHz????Χ???г???·????MEMS????????????????????Ч????????????￡??????????????????????????????????г???·?????????????????????????г????似??????????????????????????????????????????????г????似??????????????AC???????????Ч??

?????????https://doi.org/10.3390/s25061719

?????????

????????MEMS????????????IMU???????????-2022?桷

????????MEMS????????????IMU???????????-2024?桷

??TDK InvenSense????????????IMU??IAM-20685?????????

??????MEMS????????????IMU??SMI240?????????

??????MEMS????????????IMU??SCHA634???????????