?????????MEMS????????У?MMA????????????????????????????OPA?????????????????????????????????????????OXC?????MEMS??????????????????????MEMS????????????????????????????????????????????????????????У????????羧????????????????????????Χ????????????????????????????????????????????????羧????б???????????????????????????????仯??????MEMS??????????????????????????????????????????н???????????????????????MEMS??????????λ?????????????б??????????????????

??????????????????????????????л??????????????????????????????????????λ?????????Tip-Tilt-Piston 3 × 3????MEMS??????С?????????ξ????????1.6 mm × 1.6 mm????????????????MEMS????????????????????????????MEMS?????????5 V_dc???????μ?????????跶Χ?218 μm????б????????21°??MEMS??????????????????????????????51.2 ms?????????53.6 ms ??

???????λ???????????????????????????Χ?????????????к???б?????е????????????1.5 mV/μm??8.8 mV/°???????????о?????????MEMS??????й????е???????????????о???????????????????????????????????????????о??????“A tip-tilt-piston electrothermal micromirror array with integrated position sensors”???????Microsystems & Nanoengineering??????

?????

??????????????3 ?? 3????MEMS??????е???????????λ???????λ?????????????t?????????????λ???LSF?????????羧????????????MEMS????е??????????????????????????PSPI/Al/SiO₂?????????????????????????????????????????????PSPI???????????????????????????3????????????λ?????????????????????????????????λ????????????????裬?乤?????????????????????????????????????仯????????????????????????????????????????????????????????????Ч????????????????????????????????????????????????????????????????????

????λ????????????MEMS??????е?????

?????????????????????λ?????????Tip-Tilt-Piston????MEMS?????????????????????????MEMS??????о??и????????????????????????б???????跶Χ????????????????Σ?????????λ???????????????????κ???????????λ???????????з?Χ?????????????????????????????MEMS????????λ??????????????????????????λ?????????????????????????????????????MEMS???????????

MEMS??????е???????????????

????о????????????MEMS??????н????????????????MEMS??????е???????????U1-U9?? ?????????????????????????????????????MEMS???U1???MEMS???U1???????????о??????????????????λ?????б?????????5 V_dc?·???218 µm??21°??MEMS????????????????????????????0??3V???仯?????????????MEMS???U1?????????10% ~ 90%???51.2 ms????????90% ~ 10%???53.6 ms??

MEMS?????????????????????????????

λ???????????з?Χ???????218 µm????????λ???21°????б???????????????к???б???е?????????1.5 mV/µm??8.8 mV/°??????????3.2%??5.5%??λ?????????????????????????????????0V??1V???仯??????????????????????10%??90%??????????90%??10%???????????146 ms??162 ms??

MEMS????????λ?????????????????

MEMS???U1??λ???????????????

???????????λ?????????????????л??????Χ??????????б???????????????з??????????????????MEMS????????в??????????????????С???о??????????????????λ?????????????????????????LEM???????????λ???????????????????????????????????????????

???λ??????????????????

?????????о?????????????????Tip-Tilt-Piston????MEMS??????У????????????????λ????????????????????????????????????????????????????????????????????????о?MEMS?????????????????MEMS?????????????????????????λ?????????????218 µm??21°???о??????????????????????????????????????г????????421 Hz??840 Hz??????????????51.2 ms?????????53.6 ms???????????λ???????????з?Χ???????????????????????????к???б???е?????????1.5 mV/µm??8.8 mV/°??????????3.2% F.S??5.5% F.S???????72 nm??λ???????0.01°?????????????????????????????λ???????????????LEM?????????λ???????????????????????????????????????????δ?????????????????????????????????????????????λ??????????????????????????????λ????????????????MEMS??????е????????????????MEMS??????????λ??????

?????????https://www.nature.com/articles/s41378-024-00835-w

?????????

?????????LiDAR?????????г?-2024?桷

????????＼?????г?-2025?桷

?????????HUD?????????г?-2024?桷

????????????????????г?-2025?桷??