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2025-03-23 10:12:54   ????????????   ?????0   ?????

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???????????????????????????TWS???????????????????????????????????????????????????????????????????????豸??С????????У????????????????????????????????????????

???????????????????????????National Taiwan University????????????????CY Cergy Paris University??????????о????????????з?????????????????????MEMS???????????????????????????????????????????????????????????????????????о??????“The Woofer-Type Piezo-Actuated Microspeaker Based on Aerosol Deposition and Metal MEMS Process”???????Micromachines??????

?????????У??о????????????????????????????????????????????BSL?????????????????BML?????????????????????з???????????????????????MEMS??????????????????????????????????з??????????????????????????????????????????????????籡????????????????????????????????λ????о???????????????????????????????????????????????????????????????λ????????4??????????????????PET???????????????飬????????????·?壨PCB????????????????????顣

???????????????PZT?????BSL??????BML???????????￡???PZT????????????????????????PZT???????????????????????PZT????????????????糡????????????????????????????????????????????????α???Щ??????????????MEMS????????????????Ч??????????????????????????

?????????????????????????a??BSL??????b??BML??

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?о???????÷???IEC-60318-4??????????????????????????????????????????????????????????????BSL????1 kHz???3???????????????????15 Vpp??30 Vpp????￡??????????????92.4 dB??98.4 dB??????BML?????????????????5 µm??籡????????????????8%?????????????????????????????????????????????3????????????????????????????????15 Vpp??30 Vpp????￡?????????????102.2 dB??108.2 dB??

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???????????????о????????????????????????????????????????????????????????????о??????????????BML???????????????????????￡????????BSL???????????????????????????о?????????????????????Χ????????????????????·??

?????????https://doi.org/10.3390/mi16030353

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??MEMS???????????????-2022?桷

?????е???????????????????-2023?桷

?????????е????????????PMUT?????????????????-2022?桷

??????????е????????????CMUT?????????????????-2022?桷??

????????????MEMS?????? ????????? MEMS????

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