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Baolab??CMOS MEMSδ?????
2011-09-23 14:18:45   ????????   ?????0   ?????

Baolab??????????NanoEMS???????????е??????????????CMOS?????MEMS??????????????????????????????????ú??????????

Baolab???

Baolab Microsystems, S.L.??????2003??7?￡????λ?????????????????????

Baolab?????????????????о?????????????????????????????????е??????????????????????????????????

Baolab???????????????????NanoEMS™?????????????

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Baolab????????????????????NanoEMS™???????????е????Nano Embedded Mechanical Systems??????????????CMOS?????MEMS????????????????RF??????????????????????ú??????????

NanoEMS™??????????

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???????Baolab NanoEMS™??

Baolab NanoEMS™???????CMOS?????????????????????????????????????γ?MEMS????????????????????????????????????????????????????2?????

Baolab NanoEMS™??CMOS??????????MEMS?????????????????????????

 Baolab NanoEMS™

?2 Baolab NanoEMS™ 

NanoEMS™ ‘Inside-CMOS’???????

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????????????CMOS?????NanoEMS™ MEMS?????????????·????????????????????????????????

CMOS MEMS Process: Traditional MEMS vs Baolab NanoEMS™

CMOS MEMS Process: Traditional MEMS vs Baolab NanoEMS™

NanoEMS™???

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* ?????С???????????????????3x3mm LGA???

* ??????MEMS??????SoC?????????·???

Baolab???

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????????????CMOS MEMS Baolab NanoEMS

??????Colibrys???????????б????????MS9001.D
??????Tronics????MEMS???????