MEMS????????Bosch??????????16??????????MEMS?????????????????????20????????????MEMS??????????????????????????????????????????Sensortec??Akustica??????????????????????????????г??гɡ????У?Akustica??MEMS?????г??м??????????Akustica???з???????????????????????

???????????粼??MEMS?????????????Akustica????MEMS????????????????????????????????????????????????????58.22?????????????8.7???????????4?????IC??????????MEMS?????????????????????????????????????1???

??????1995??????MEMS???????????1??10?????13??????????????????????20????????????????????3???????????2??10??????????????????С????????????????????????5????????????????????130???MEMS????????

???????iPhone??iPad????????MEMS???????????????????????????????MEMS????г?????????????????????????????????????????????????????????????????MEMS????????

???????????????????豸???????????????????????????????????????С??????????????????????????????????????Ч?棬????????????????????????????Sensortec??MEMS???????????2cm????????1cm???????????????С???????????

???????μ?????3??MEMS??????????????????????????????????λ????????????????????????????????????????????

??Akustica??????????MEMS???磬??ЩС?????糤???????????????L???·???????????????????????????????????????????????MEMS??????????????г????????????????????MEMS?????????л?????δ?????????????и??????????

????????

????????????????????????????????????????????????? 1970 ????????????? ????1973?????????????????????????????????????????????????????λ????????м???????????18,000?????????????????????????????м???????? ????????????г??????????????????￡??????????????????????????

????????????????????????￥,???356,878??????,?????????￥???????????????????豸???·?????????????,???г???????????? QFN, CSP, USP, BGA, PLCC, SOIC (SOP), SSOP, MSOP, TSOP, TSSOP, QFP, T/LQFP, SOT, TSOT, SC, TO, PDIC, COB, OLCC, OPLGA, MICRO SD, and MEMS ??з???????