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????MEMS?谐????????????????????????????????????????IDM????????MEMS?谐?????????????浠�——??CMOS????????????????????????????????????GLOBALFOUNDRIES????????MEMS?????????????????MEMS????????????????????????????????????泄??????????????GLOBALFOUNDRIES???MEMS??????Rakesh Kumar???????霉???渭???????????械?CHInano2012????????MEMS???????????????????????????“?浠�?械?MEMS????MEMS Manufacturing, the changing landscape??”???????Rakesh??CMOS??MEMS??????????????????????????????????????25?????????椋�??谓????????????????????????????泄???????????????????????????????????????????MEMS???????????????????????????GLOBALFOUNDRIES??MEMS??????????????????????????????????????????????????????????眉????

???GLOBALFOUNDRIES???MEMS??????Rakesh Kumar???

Rakesh?MEMS???????GLOBALFOUNDRIES??????

GLOBALFOUNDRIES??MEMS????????200mm???????????500????~130?????????????????????????80%??MEMS?????璞�??CMOS????璞�??????20%??MEMS???械??璞�????????????些?璞�????IC????????200mm??????????MEMS????????械??

?????MEMS????????????????IC????????200mm????????????????MEMS???????????????????????????谐??????????????????????????????????1?????????200mm??MEMS????????????????????????????????MEMS?????2????MEMS???????GLOBALFOUNDRIES??3???????????????????Foundry StandardProcess?????????????????????????Joint Customization Process???????????????????????Customer Proprietary Process???????泄???????????????????????????????????GLOBALFOUNDRIES?????????????????????蟹?????????????????????未??2-4???????????2????

MEMS?????CMOS?????????????MEMS??CMOS?????????25??IDM???????????MEMS??????????谐????????????????????????MEMS??????????150mm???200mm???些IDM???????????????????8???????????MEMS?????????????

200mm?????MEMS????????????????????????IP???????????????IP??????????MEMS???????????????????????????????????????IDM??foundry?????????伪???IP????????????????????????????????????????????????

??GLOBALFOUNDRIES????InvenSense?????Nasiri????????CMOS-MEMS?????????????Fabless???????????????????????????MEMS????校?????????????????????????????????????????????????????纭�???????????????RF??????

???????MEMS??????????????1????????????????????????渭??????????2??????????????????????3???????????????????????????????????????小?????????????????????4???fabless/ fablite???????????????????????5??NF协?????魏?????IP??????????MEMS?????“one product - one process”???“many products – one process”??

GLOBALFOUNDRIES??MEMS???
??1?????????????????????MEMS??????椋�
??2??????MEMS?????????????????????????校?
??3???????????????MEMS????????????????????
??4???????“????”??“CMOS????”??MEMS?????????
??5????????????????????????????????????
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GLOBALFOUNDRIES??MEMS??????????????
??1?????????????
* 1????CMOS?????MEMS?????
* 100/1000????????MEMS?????
* ?璞�???/?????2010??12??
??2??????
* ???????Si?????
* ????SOI???
* Poly TSV
* CMOS MEMS????
* MEMS????????
??3??????
* ?????????2011??3??
* ??????????2011??8??
* ????2014??????????15k????

??????

1. GLOBALFOUNDRIES?????????些??
Rakesh??GLOBALFOUNDRIES???????谐??????????????????????????RF MEMS???????????????MEMS??

2. GLOBALFOUNDRIES?屑???MEMS??????????8?纾�????????
Rakesh???????????8???MEMS???????????????????????GLOBALFOUNDRIES????????????????????????????????2014?????????????????15,000??????

3. ????????????MEMS??唯?????????????????椋�??????-锟�???GLOBALFOUNDRIES????些????椋�
Rakesh??InvenSense??MEMS???????????????????????????????楗�???????????????????????????????协?椋�???????????????????椤�

4. 2011???????MEMS????????????InvenSense??????????????3?????????6??????????????????????????????
Rakesh????????????????????InvenSense????????????榻�??????????????????????????????????????????????????????

5. Nasiri-Fabrication Platform??GLOBALFOUNDRIES?????????????????些???????????危?
Rakesh??Nasiri?????????????????谐??效???CMOS??MEMS?????????InvenSense???????????????????????????????????????MEMS????????????????????????????围????????????????
???????????????????????????????????????????????????????????

6. ?????????CMOS????????????????位????CMOS MEMS????????GLOBALFOUNDRIES?????????泻??????????
Rakesh???????????????????????????????????????MEMS??????椤�????????????????MEMS??????????????????????????????????????MEMS????????????????????????????????????????????????榇�?????????????????????GLOBALFOUNDRIES???????????

7. ?????澹⊿TMicroelectronics????TSV????MEMS芯????????????????????TSV?????3D IC??未???????GLOBALFOUNDRIES??尾????
Rakesh?????????TSV????????小MEMS?????????纾�????????MEMS???????????????????????MEMS?????????????????TSV??????????????谩?

8. ??Teledyne DALSA????GLOBALFOUNDRIES??????????
Rakesh??Teledyne DALSA?????????????????????????????????????????????MEMS??????小?????????????????GLOBALFOUNDRIES???????????IC?????????????????????位???????????????璞�??????????????????????????????????????InvenSense??GLOBALFOUNDRIES?????????????

9. ?泄?????MEMS???????Start up??????小????GLOBALFOUNDRIES????????????????????????泄???位??
Rakesh???????泄??????泻??小???Fabless???????????????????????些???????????????????????????????????些???????EDA??????椋�?????Fabless???????????????????????????蟹???

10. GLOBALFOUNDRIES?????????MEMS??????????????未?????????
Rakesh????????2011???MEMS????????????些?????????????????????????????????????2014????????MEMS?????????????

????????

GLOBALFOUNDRIES????????锟�????????????????泄?????????????????????????位???????寰�??????????2009??3?3?????????????????????????????????????????????160????????????????????????????????????????????????????1??????????????GLOBALFOUNDRIES????????????唯????????????????????????????????????????????????????3??300mm??????5??200mm??????????????????????????????????????????????????????些?????蟹?????????????????些?????????????????????????????????????????

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