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???2~3????????г????????й?MEMS???繩???????????????????????????????й???????г??????25%????????????????????2013??2014??2015????????????13????15????18????

?????????????????MEMS??????з????г???????????????????????12??????????????????2012??2011???????????8.71???????6.24???????

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MEMS???????????????????磬???г??С?????????????????á????Ч???á??????????????Yole Développement???2014??50%?????????????MEMS???磻????2016??50%???????????????MEMS???硣????MEMS???绹????????????豸??????????е???á?