?????MEMS?????????LIDAR????????????????????????????????????????????????MEMS??????“??С??6????????????”????????????ù???з??????????MEMS???????“ECO SCAN”????????飬???????????????????????

???????“??С??6????????????”

??С??6???????????????e??????????Ч???????????????????????γ??????10.6mm????14.5mm????????1??????????????????棬??X??Y??Z??????????±30N???????????????±30Ncm????????????3?????????????????棬?????0.1??0.2mV/N??X??Y??????????0.2??0.6mV/Ncm??Z??????????0.2??0.3mV/Ncm??

?????????????????????????????????????????????????????????磬????????????????????????????

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