?????????????????MEMS?????????????????????????????????????????????????????о????????????????????????????й???????????о????????????MEMS?????????????Silex 98%??????????Yole???2014-2019?????MEMS????????????????????????20.5%???г????????2019?????16???????δ??????????

??MEMS???????????????????????MEMS????????????г?????????????????????IDM??????????????????????????Σ???CMOS??????MEMS?????????????????ü????·?????????????????δ????????MEMS???????????????Yole???????MEMS????????MEMS?????г?????????2014???52.47%??????2019???66.55%??

???????Э?Ч??????????MEMS????????????????Silex??????????????MEMS?????????????????Σ?????????????????????????????????δ?γ?MEMS??????????????????????????????????????????????????????????Silex???????????????????????8???????????????????MEMS???????????????????MEMS???????????????н????MEMS???????????????MEMS?????????

???????????????????ú????????????????????????????????????????????????????????????????????????????????????????й??????GNSS??????г??????δ??????????????????????????????????????????????о?????????????????????/?????????????RTK??????????????λ??????????????

??????????????MEMS????????????????θ???“????”??????????????????β?????Silex???????????????????15/16/17???????????1.73/1.85/2.05????????????й???????????0.51/0.60/0.73????????????Silex??????????????15/16/17?????????0.57/0.89/1.06???????????????????EPS??0.71/1.11/1.32???????????????????????棬?????????????????0.17??????

??????????????????????????????裬MEMS??????????????