?????????Coventor???????????????????????????MEMS??о????????3D finFETs????10????????????????????豸??????Lam Research????????????????Lam????λ??????????Coventor??

???????????????????????????????Coventor??Lam????????????????????Lam????SEMI?????MEMS????????д??MSEC??????????????????????????????????????????????????????????????Э?Ч?????????????????????????????????????д????????

??MSEC?У?Coventor??MEMS????????Stephen Breit????EE Times?????????“Coventor??????????MEMS????????????????MEMSо???????3D?????????????????????????????????3D???????????????????δ?漰?????????????г???”

?????Lam????MEMS?????????????豸??????????????10??????????????????豸?г???????Coventor???????????????????Lam??????????????????????????????Э???????????????????????

Lam Research?????????????

Lam???????????Michelle Bourke?????“Lam??MEMS?豸???????????????????????????????????RF??MEMS??????????????????????????????????г????????????????????????????????????????????????????????????Щ?1???????”

Bourke???????“????????????????MEMS???????е???????????????????????????????????й辧?????????????????????”

Lam??Coventor?????????????л??棬???????????????????????????????????????????????????????????з??2?????????????????????????????Lam?????Coventor????????????????????????????MEMS?????????????

Breit?????“??????????????????????????????????????????????????????????????????1??1????3??????”

CoventorMP??????????????MEMS+?????CoventorWare?????????豸???????????????????????????楨???????????????Matlab?????·?????????????Cadence??

?????????

??MEMS??????-2017?桷

??MEMS????г??????????????-2017?桷

??MEMS??????????????????-2017?桷

??????MEMS????????г???????????-2017?桷