11??29???????о???????γ????????ζ????й???????????????????????????????????????·????????????????????????8???MEMS????????????п???????п?????????????????ζ???????????馡?о?﹫????3????????????????????????????μ???С?

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?????????????βμ???ζ?????????????????mCube?????????????????????????????????????mCube???????????MEMS????????????????????????????????????????mCube?????????????????????????????????????С??????????MEMS??????????????????????????????????????

?ζ?????????????mCube????????????????????

mCube?????????????????????????????????????????????mCube????????????Xsens?????????????????????繤?????????????????3D ???????????????????????????????????????????

mCube??MEMS?????????????mCube?????????CMOS??????????MEMS??IC?????????о???????MEMS????????????????????

?????11??16????? mCube??????????????MEMS?????????????????????5????mCube????5?????????????TCL???????TCL??????г????????????????????????mCube???????????????????????豸????????????豸??????????????????????á??????????????????á??????硢?????綯???г???????????е???????з??????

?????????

??MEMS??????-2018?桷

?????iPhone X?е????6??IMU??

??ADI????6??MEMS???????????ADIS16460??

??????Colibrys VS1000??м??????

??Silicon Sensing??????????Z?????????2??????????CMS300??

??????SCC2000??У?X??Z?????????3????????

???????????г?????-2017?桷

??????????г?????-2017?桷