Introduction to RF/Wireless MEMS Technology and Commercialization

Course Begins: 21 February 2017

?γ??????2017??2??21?????????????Σ????????

?γ??飺

MEMS????????????????????е?????????????????????????????????????????????????????е?????????????????????У????????????????????????????

???γ??????????л?????????????????????????????????????????????????????á?????????????????????????豸???????????????????????????????????????????????

???γ??????????????RF MEMS?????????????????????????????????????Щ????????????????????????????????????????й??г??????????????γ????????????MEMS??????????????????С?????????????????????????????????????????????????????????·????????????????????????á?

???γ?????й???????????????й????????????????????μ?????????????????wangyi@memsconsulting.com

?γ????

???γ???????й???????????????
1?????/????MEMS????????????
2?????MEMS????????????????
3??RF MEMS????????·????????????
4??RF MEMS?????????????

?γ????
1??MEMS????????
MEMS??????MEMS??????
2????????MEMS???????????
????????????MEMS?????????????
3????????MEMS??????MEM????
????????MEMS?????MEM???????????
4????????MEMS??????MEMг????
????????MEMSг??????MEMг????????????
5?????MEMS???
MEMS ???????????е?????????????????MEMSг????
6??????MEMS???????·????
???????????????MEMS????????????·
7??RF/Wireless MEMS???????????

?γ???????????????????
1??????γ????16???????Σ????30?????
2??16?μ?????????????ɡ?
3??????γ??????楨?κ?????????Ч????????

????????

Hector Jose De Los Santos?????NanoMEMS Research??LLC.??

NanoMEMS Research??????2002?????????RF MEMS????????????????з???????????????????????RF MEMS??????????豸????·????????ó?????о?????????????????????

????в????ù??????ú?????????????????????????????????????????ò???λ????NanoMEMS????????????????Coventor(Irvine,CA)?????????????????????????Los Angeles,CA??????о????δ?????ü??????????????в????RF MEMS????????????????·??????????????????·????????????????о??????????????檔

????в?????30???????????????????1????????????????????????????????磨MEMS???????????1999?????????????RF MEMS??·??????2002??????Springer??????NanoMEMS???????????á???2005??????????????????2014????Springer??????????????????????

???????о?????????????????????塢RF MEMS????????????е??????????????о??????????????2006??????????????IEEE??????????????λ????????Э??????

?????????????????????????????????????????IEEE Trans??????IEEE Trans??????????IEEE Trans?????????IEEE Trans???????????????????????IEEE?????????????? J. Vac. Sci.and Tech. A??IEEE/ASME J.?????????IEEE Trans??????????????COMPEL: The Int. J. for Computation and Math in Electrical and Electronic Engg.???

?????????????????????NSF?????????????ESF????????????????ARC??????????????????????о??????NSERC????????????

?λ?????????????????????wangyi@memsconsulting.com

?????????

??2014-2018?????RF MEMS?г???

??Wolfspeed?????????HEMT??CGHV40100F??

??Avago?????????????飺AFEM-9040??

??2016-2022??????????????г?????á?????????????????

??????е??????????????????????????????г????

???????RF???????г??????????????????