Product Analysis of Amphenol NovaSensor’s Pressure Sensor Die P883

NovaSensorλ?????????????????????????MEMS?????????о????з????????????????????????????????????????????????1985?????????NovaSensor??????е???????????????????????????λ??NovaSensor??????1985????????Lucas NovaSensor????MEMS????Kurt E. Petersen?????????1999???????????TRW Automotive?????NovaSensor??2002??????????GE????TRW???????NovaSensor??2013??Amphenol???GE?????????????????????NovaSensor????

NovaSensor???????????????????????????MEMS?????????о??????????????????????NovaSensor????????????????????????????????????????????????????侫???????????????????硣NovaSensor??????н?????????????????????????????????У?????δУ??????У??????????????????汾?????????

??????????????NovaSensor??MEMS?????????о?P883????2.1mm x 2.1mm???????и???????????????λ???????????????????????????????乤?????????Ч?????????????в?????4??????????????衣??????????????????????P883о?????????????????????????????????P883??о??????????????????Χ???????????????Ч??????????????????????????????о?????衢???????????????????????????????

NovaSensor??MEMS?????????о?P883

?????????????????MEMS???????????????????Amphenol?????μ?NovaSensor?????????о?P883?????????????????о???????????????????????????????????????MEMSо????????????????????????????ο??????????????????????????????????????????????￡?

1. ???????????????????о?P883????????????????????MEMSо?????е?????????????????????????????????λ??о?????棬о???????????????????????????????MEMS???????????????????????????????????????????????????????????????????????????????????????????????????????????γ??????·??????·??????????TiW/Pt/Au???????γ???????????????????MEMSо????е????????????з????????????????????????????????????????5401Ω??

NovaSensor??MEMS?????????о?P883??????ò

NovaSensor??MEMS?????????о?P883?????

2. ????MEMSо?????????????MEMSо?????????з?????????????????????????????Σ??????ù?????????????????????ɡ?

NovaSensor??MEMS?????????о?P883?????????????

3. ??????????????????????????????MEMSо?????????л???????7??????????1??????6?????????????????и??????衢????????????β???????????λ?????2??????1??????????????????λ???

4. ????????????????о?P883?????????????????????????????????????????????????????????????????????????????????????????Χ???????????????????????????????Ч?????????????????

Amphenol??????NovaSensor??????????????????????

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1. ????????
- ??????
- ?????????????

2. ???????
- NovaSensor????
- ???????????
- ????????
- ?????????

3. ???????
- ???????????
- ???????????
- о????????
- ???????
* о????????
* ??????ò????
* ?????????
* о????
* о????
* ???????????
- ???????
* о??????????
* ????????????
* ?????
* ??????β?
* ????
* ???????
* ????????
- ????????????
* ????IV????
* DSIMS????????衢???????????????
* DSIMS???????????????
* ???????????

4. ??????
- MEMSо???????
- MEMSо???????????

5. ???
- ???????
- ??????

6. ????????????????
- ?????????????
- ?????????
- ?????????????

???. ???????????tdb/GDS???

??????????????NovaSensor?????????о?P883????????????棬?????????????????????wangyi#memsconsulting.com??#????@?????綽??17898818163????