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- ??69???????????????γ?????г?????????
- ??????????????г?-2025?桷
- ??68???????????????γ????????????????
- ??SGX Sensortech???MEMS??????????崫????MP7227?????????
- ?????????????紫????????????????????????????
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- ????????紫?????????????-2024?桷
- MEMS???????????????????????δ?????
- ??67???????????????γ????????????????
Orbotech???5700????????????????????????????????
2015-12-14 21:28:19 ???????????? ?????0 ?????
????????Sigma fxP PVD????????????????SPTS?????????????????????????????????Orbotech????????????SPTS???????????????????о????????5700????????????????????Sigma fxP PVD??????
?????????????????????FOWLP??????????????????3??????????????RDL??????????????????????????????????2015????????????????2016???????Orbotech????????2015??????????????????????????????????????????????
Sigma fxP PVD??
??????й??Yole Développement 2015??9?·???????????????????????????棬????磨TSMC?????????????????????????backend integrated fan-out, InFO????????2020??FOWLP???????2.4???????????24???????Yole???FOWLP?????????????????????????????????????????????????54%????????????????????????????????豸??????????????????????г?????????????????г??Ч??????????????????????????????????????????????????????FOWLP????????eWLB????????NANIUM?????1???SLIM & SWIFT ??????????InFO??????磩??RCP????????????????Orbotech????????SPTS?????????????????????????漰?????????????????????????FOWLP????????????????????????
“????????????PVD?????????????????幫????FOWLP?????????ζ???????????????????????” SPTS ??ü?Orbotech???????? Kevin Crofton?????????“??????FOWLP???????????????????????????????????????о???С??????????????????????????????о???????????????????FOWLP?????????????????????????”
2015??6??14????????????о??????IMEC????????????????SPTS??????????????????????????????????????2015???SPTS?????????????????????????????????????e???frame-supported???????????и??3D????????????????????????????????????????
???????????????????? FOWLP ??????
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- MEMS????豸???????
- ???????????????ML200Plus?????????????????
- "????????"??????????????????????
- ??????????????????/???????????SUSS MicroTec
- MEMS?????????????????
- ULVAC?MEMS??PZT??籡????????????????????????
- KLA-Tencor??????????·?????????????????????в??
- ???????????????40????????KLA-Tencor
- MEMS??????????????STI3000
- ??ò????????????????????MEMS?????????Epi???
???????????
- 1.6K??????????????????/???????????SUSS MicroTec
- 644??ò????????????????????MEMS?????????Epi???
- 431Nanoscribe??????μ??????????????豸Quantum X
- 393???“????????”????о???????????????????????...
- 272KLA-Tencor?????й??????????
- 269??????????????KLA-Tencor??????????
- 244??????????KLA????????????????????
- 227?????????????KLA-Tencor??????????????????