?й????“?????”????????????????????????豸?????ε????????л??????????Multitest??????磨MEMS?????????????黯???????????????????У????飬??????????????????????????????????????й??????????MEMS????????о???????????

??????????????????????ε?????3??????????????????????3?????21.33??????????????????0.75???????????0.57?????4??????????????????????豸?????11?????????18.3????2.68??????????г????????????ε?????4??????л??????7????????3???????25????????????????????

???????豸??FEI????1.6??????????????豸??DCG Systems??ε????10?μ????????Spirox Cayman??????е?DCG Systems??????豸??FEI?????????2,090????????????????6.78???????????????5.13??????????4????????????檔????????????ε????????????????????5.5??????ε????????????????????????

ε????????MEMS?????????????豸?г????????Multitest??????????????????Multitest?????????????????????????????????8??????????в??????????????????Pick-and-Place??????????????????????????????2???????ε???????????????????????????????????????????????Ч?檔