- ???锌?????????????????????围MEMS?????????
- Bosch????????????????????效?????MEMS????????
- MEMS??????????纬?
- ?????????????????纬?
- ??????????3D??????????????
- ??5G?????????????????????????-2019?妗�
- ????OMEMS????????????围??OPUS????????????????
- ?????小????????????????????430????????
- ????O??????????Pico???霉?????????ToF????
- ??????娌�?????MEMS????AlN??PZT???????????
BSE??????Zeus??????????????MEMS?????????????效??
2019-11-09 11:40:55 ???????????? ?????0 ?????160
?????????????????????????????????????????????????????1????????????璞�?????BSE????????Zeus???????????????????????????????卸???????????????????MEMS??????????????????????????MEMS?????????????????????????????????????BSE?????Zeus???MEMS?????????????????????????????????????????????????????械???????????Zeus???MEMS???????????????效??????????????小??????????????????????谐????BSE?????Zeus???MEMS???????????????????????????效??????????????
“BSE???????????MEMS???????????????????????????????IC??0??18???????????????????????????????????????????”BSE???????????Kevin Brennan?????“Zeus???MEMS???????????????????????????????????????BSE?????????????????????????????????????????????瓒�??????????MEMS??????Zeus???MEMS???????????????????”
Zeus???MEMS????????????????????0??18????????0??3 PSIA?????????????????150 PSI???????????BSE??????????????70?????????????????Zeus???MEMS?????????????路?????????????e?????????????????LN2????BSE?????????????MR2?????????2????Zeus???MEMS????????????????????????????????BSE??????????????????
?????????
???????????????????????????????
????????????????? MEMS???? ?????????
??????ULVAC?MEMS??PZT??绫�????????????????????????
???????????
- 0
- 0
- 0
- 0
- 0
- 0
- 0
- 0
??????????
- MEMS????璞�???????
- "????????"??????????????????????
- MEMS?????????????????
- ???????????????ML200Plus?????????????????
- MEMS??????????????STI3000
- KLA-Tencor?????泄??????????
- ??????????????????/???????????SUSS MicroTec
- ?????????????????????????????????????
- ???????????????40????????KLA-Tencor
- ??貌?????携??MEMS??????????????芯??????
???????????
- 430??????????????????/???????????SUSS MicroTec
- 230???“????????”????芯???????????????????????...
- 183??????????????泄?????????????????
- 144??貌????????????????????MEMS?????????Epi???
- 72??????????KLA????????????????????
- 72ULVAC?MEMS??PZT??绫�????????????????????????
- 53????????????????????????????????
- 23携???????锌????????????????????????路???????