???????磨TSMC?????????????MEMS????????????????201%????????????????????г??????????????μ??????????

??IHS iSuppli?????MEMS???????????棬2011?????????????????5300????????????2010???1760????????ù???????????г????????MEMS???????????????????3??????????????????MEMS????????????????????????????ī??????

??12????MEMS??????????????????У?????????磬???MEMS???????????????????????Silex Microsystems??Teledyne Dalsa??Innovative Micro Technology??X-Fab??Tronics??Jazz Semiconductor??Semefab??Global Foundries??????????????????Asia Pacific Microsystems??Micralyne??tMt Touch Microsystems?????1?????

???12??MEMS???????????????????2.86?????????2010???2.318??????????23%??

??????MEMS??????????????????InvenSense??????????????3?????????6?????????????IMU??????????MEMS??????????????????????????????????????????????????InvenSense????3???????????????????????????3?μ????????????????????????????????????г???

????????MEMS???????????????????????????壨ADI??????????ADI??????iPad 2???????е?MEMS???????????????????????????

???????????????????????????????MEMS??????????????????????????????????????????????????????????MEMS??????????????ù??????????????????????????????????????????????????????????????MEMS???????????????????????????????????????????????MEMS????????2008??

Silex??Teledyne Dalsa??????????????

???Silex Microsystems??2011????????????MEMS????????????????4590?????????2010???3600?????????28%???????????????????????????????MEMS?????

???????????????????????????60??????????MEMS????????漰??????????????á???????????辵??????????????????????????????????????????????????????????????St. Jude Medical and Debiotech S.A.??MEMS???????

Silex?????????????TSV???????????檔TSV???????γ?3D?????3D?????·??????????????Silex??????????????1??????????????????MEMS????????????????主????????ж???????????????????Ч????У????50%??TSV?????й??

TeleDyne Dalsa??????????2011??MEMS???????3700?????????2010???3090?????????20%?????MEMS?????????????????ù?????????г????????JDSU??????????????????/??????????WSS ROADM????

Dalsa????????????????????????????????????????????????????????????????????г???δ???????????????????????????????棬????????????л??3????????????????????????????????IBM Canada??????IBM Canada??????????????????????????У????????????????????Dalsa??????200????????TSV???????????????

?????Micralyne??????JDSU????????WSS ROADM???????ò???????????????????????赲??????????????????????????????????MEMS????Micralyne??????????????????????????2011??MEMS?????????46%????2010???3130?????????1680????????????????2010????????????????

????????????

????????????????2011??????????????MEMS??????????????????????????Innovative Micro Technology (IMT)???????????1?X-Fab?????????????Tronics????????10??????????Jazz Semiconductor????????11?????Semefab????????12??Global Foundries??

??Щ???????????????????????????????λ??????11%???178%??Global Foundries???????????178%???????????????????????????硣

?????????е??????????????????Asia Pacific Microsystems????????????Micralyne?????????????tMt Touch Microsystems??

2011???????????MEMS????????????MEMS??????????????????????????????????????MEMS????????????????????????????????ü??????á?