2010??????????“????”?滮???????????????2000??6?·????????18??????????10????????浽???2011??1??28????????????????[2011]4?????????????????????·?????

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2010??????IC??MEMSо???????????

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125mm??9????????????????58???????????????????????????????????????????

100mm??15??????????????????衢????????????58????????214?????????????????????????????771????????24????????47??????????????????????MEMS?????廩?????MEMS??????????о??MEMS????

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300mm??????4?????????о?????????????????人??о????????????

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150mm??????9?????????????????????????2???????????????????????????????????????VDMOS????????л???VDMOS????

125mm??????1????????????????????????????????????????????廩?????

100mm??????1??????????? 214 ???????????????????廩?????MEMS??????о??MEMS????????п???????????????????????????

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150mm??3???????????????????????????

125mm??1????????????

100mm??1???????????

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300mm??1???????????????

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125mm??2????????58????????????

100mm??1????????58????

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100mm??1????????214????

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200mm??1?????????о?????

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150mm??3??????????2????????????

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150mm??2?????????????????????

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