X-FAB SiliconFoundries???????????????1?MEMS Foundry Itzehoe GmbH (MFI) ???????25.5%????51%????????????????MFI?????X-FAB MEMS Foundry Itzehoe??

??????X-FAB?????MEMS??????????????Itzehoe??????????????????????????X-FAB MEMS???????MEMS???????????????????????????????????????????????????????????????????

X-FAB MEMS Foundry Itzehoe???????????Fraunhofer ISIT MEMS Group??????????????????????????????г??????м????????????ú???????????????

X-FAB Group?г???????????Thomas Hartung???“????????????????MEMS?????????л??棬??????????X-FAB??????????????CMOS??????MEMS????????X-FAB MEMS Foundry Itzehoe???????????MEMS??????а?????????????????????????MEMS?????????????????????”

“????Itzehoe??MEMS????????????MEMS????????????????????Fraunhofer ISIT??????????????????X-FAB?????????????” X-FAB MEMS Foundry Itzehoe??????Peter Merz??????“????????????????MEMS???????????????????????????????X-FAB???е????????????????TSV??????????????X-FAB???????????????????????????????????????????????????豸??????????????????”??