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??????????????MEMS???????????????
2012-11-06 10:05:28   ????????   ?????0   ?????

MEMS?????????????????г?????a????????????MEMS??????????IMT????????3D MEMS???????????????????????????????????????????????????????????????????????????????????豸???????

MEMS?????????????????г?????a????????????MEMS????????—IMT??Innovative Micro Technology??????????3D MEMS???????????????????????????????????????????????????????????????????????????????????豸???????

IMT?????????Craig T. Trautman?????MEMS????????????????????????????????г????????????????MEMS???????????

IMT?????????Craig T. Trautman?????????IMT????22??????????MEMS?????о??????Owl Biomedical?????????????--Nanosorter??????????????????????????????о?????IMT??????????????????????22????MEMS???????????????????????????????????????????????????????о??????Ч?????????????????о??????

?????IMT??Owl Biomedical??????????????????????????????????????97%????????????????С?????????????????????????????????????????????????????????????????????????????Trautman?????????????????MEMS????????ü???????????????????г???????????????????????MEMS?????????????????

??????????????????IMT????????MEMS??????????????????RF?????????硢?????????????????????????MEMS???????????????2?????????MEMS??????????????á????MEMS?????????????????????????????????WLP????TSV???????????MEMS IP?????????????Э????????????о???

Trautman?????????????MEMS?г?????????????????????????У??????????MEMS????????????????????????????????о???????????????????????????MEMS???????IDM???????????????IMT????????????MEMS?????????????????35??40???????????????У????????????????????????99%????????????MEMS?????IP??????????????????????????????г???

???MEMS??????????????????????з????????????????Trautman????IMT?????MEMS??CMOS???????????з???δ?????????????????????????????????MEMS????????????????г??????????????

????????????MEMS ????? MEMS????

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