????

?????????????????????????????????MEMS??????????????????漰???????????裬MEMS??????????·?????????????????????????豸?????籡???????????????????????????????????????????????????????????MEMS?????????????????е?????????????????????豸????LIGA???????????????????豸???????????????????????????MEMS??????????????????????????????

?????????MEMSCAP MUMPs???????????MEMS ??????????????MEMS?????????????1992?????????????????????????????80??????????????????????????????MEMS?2?????????????????????????????????????????????????????????????????MUMPs??????????????????????????????????2????????????С?????????????????????????????????????????????????????????????

????????????MUMPs???

??????????????????????????????????????????MEMSCAP?й??????????飬????????MUMPs????????????????????????????????????MEMSо??????????????????????????????????????????????????????????????????????????????о?????????????????????????????

????MEMS???????????

MUMPs????????

MUMPs??????????????Poly MUMPs??Metal MUMPs??SOI MUMPs??

Poly MUMPs??????????????????????????????????????????????????????????·??????????????????OMM??????????????г???????????????????????????????????????MEMS MPW?????????????90?????Poly MUMPs?????????????????????????γ???????????????????????????????????????????????????????????????Poly MUMPs??????????????????????????磩??????????????????????????????

SOI MUMPs????MEMSCAP?????????????????????????????????????????2003????????г???SOI???????????400um??????????????????????????????????10 um??25 um???????????????SOI????????????????SOI MUMPs??????????SOI????????????乤????????????????????????????????·??????????????????????????????????????С????2 um????????SOI MUMPs????????????????????????????????????????

Metal MUMPs????MEMSCAP????????????????????????????????????????2003????????г???Metal MUMPs????С????5um??????Metal MUMPs???????????LIGA?????????????????????蹤???????????????象???????18~22um????????????????????????綏??????????Metal MUMPs????????????????????????????????????????RF???????

???????????Poly MUMPs?????????

Poly MUMPs?????????8????????γ?7?????????????????蹤???3??????2????????1?????????????С????2????

??1???????N???100?????????????????????????PSG?????????????????????????????????????????PSG??

??2??????LPCVD????600nm??????SiN????????????

??3??????LPCVD??SiN?????500nm????象?Poly 0???????е???ι???????????????????????Poly 0??

??4??????LPCVD???????2um??PSG??1050?????1С?????PSG????????????????????????????????Poly 0??

??5??????????????????DIMPLES????????Σ???DIMPLES????750nm?????????RIE???PSG??

??6????Anchor 1??????????Σ??????????RIE???PSG????????????Ploy 1????????

??7??????LPCVD????2um????Ploy 1?????????LPCVD???????200nm??PSG??1050?????1С???Ploy 1?????????PSG??????????????Ploy 1????????????С?????

??8??????????PSG??????????????Σ???PSG???????????????????檔?????????Ploy 1??????????????PSG??

??9???????????PSG??????????750nm???????????

??10????Oxide 2???????β???????Poly 1 - Poly 2 - Via????????Σ?????????Ploy 1??Poly 2?????????????Oxide 2????RIE????????

??11??????Anchor 2?????????Σ???????????????Oxide 2??Oxide 1?????????Ploy 0????????Oxide 1??Oxide 2????RIE????????

??12??????1.5um??Poly 2???????Ploy 2?????200nm??PSG????Poly 1???????PSG????????????????????????á?1050?????1С??????СPoly 2????????

??13????Poly 2????й???????Σ???PSG????Poly 2?????????????RIE????????

??14?????н????????????Lift-off????????Σ???????0.5um??????

??15??????????????и???????????????????49%??HF???1.5~2???????????????????????????????110??????м???10??????????????????

MUMPs????

MUMPs??????????г??????????????????????????????????????????????????????????????????????????????????????????MUMPs????????????????????????????????????????????????????????????????????????????????????????????????и??????????????????????????????????????м??????????????????????????

??1???????????????????????????????
??2???????????μ?MEMS??????
??3?????????????о????????????????????????????
??4?????ó????????????????????????????????????????????????
??5?????????CAD?????????????????
??6??????????????????????????????

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??????????????2011???????????????????????????????????????????????????30???????????1200?????2010??2?????????????о???????????????衣?????????λ????MEMS???????????????????????ò?????????????????????????????????????????????????????????????????????????????????????MEMS????????????г???????

???????????MEMS?????????????????????????MEMS???????????????????30?????????????????з?????????顣??????????????????MEMS?????????-о??????飬?????????MEMS?????????????????????MEMS????????????????????????????????????MUMPs???FAE???楨?????????????????????????????????????MEMS?????????????????????????????С?????????????MEMS??????????????Ч??????????????????????????????????????????????????????????????

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