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????????MEMS????????????????MEMS???????????????IDM??????????????????????? MEMS????????????MEMS????????????MEMS??????“?????”???????????????????豸?????IDM??????????????????????????????????????MEMS????????

???????????MEMS???????????????????????????????????????????fabless???????????fab-lite??MEMS????????ADI??InvenSense??Knowles??????Щ?μ?fabless?????????????

Fabless???????????г????IDM?????????????MEMS???????????????飬???????????????С?????????MEMS???????????????????MEMS????????????????????MEMS??????????????????????the Wild West?????????д???????????MEMS?????????????????е???????Щ????????????????????????????????

“MEMS?????г???????????”???MEMS??????Silex?г?????????????????Peter Himes?????“????????С?????????????????????????????????MEMS????????????????????????????????????????????????????”

Silex?г?????????????????Peter Himes

??????????????????ЩMEMS???????????????????????MEMS????????????????????????????????????????г??????????????????????磬?ЩMEMS?????????????8??繤?????????ЩMEMS???????????????????????MEMS-CMOS???????й??н???????????????TSV???????????????WLP????

MEMS???

???????????????????????е?MEMS????????????????????????????????????????????????????????????IHS????2013??MEMS?г????????90.9??????????2012???84.1?????????8.1%?????2??IDM?????????????壩???????????MEMS?г???????7.93???????

????Yole Développement?????????廹?????????MEMS????????2012??????????2.03?????????????6500???????????????????????????塣?????????????ADI??InvenSense???????????????4200?????????2011???????????2012??????????

??Yole Développement??????MEMS?????????а??У?Silex??2011?????????????2012??????????Teledyne Dalsa?????????????Global Foundries????μ????20????

“????20%??MEMS????????????????????”IHS?????Jérémie Bouchaud?????“???????????????????????25%??????MEMS???????????????????????????????????????”

???MEMS??????????????????????????????????IDM????????????????????????????????????MEMS?????????Ч???“???????????????????????????????????????????譚??MEMS?????????????” GlobalFoundries??MEMS?????????Rakesh Kumar???“MEMS?????豸???????CMOS?豸????????MEMS????????????????????????????”

GlobalFoundries??MEMS?????????Rakesh Kumar

“???????MEMS???????????ж??????????????????????fabless???????????????MEMS????????????????????????飬???????????????????????” Kumar?????“??????????MEMS???????????????fabless????????????IDM????????MEMS?????IDM??????????????????????????????????IDM?????г?????????????????????MEMS?????????????MEMS?????????????????????????”

????????????Kumar???IDM?????????“???”MEMS????????“???IDM???6???MEMS?????豸?????????8????豸???侺?????????????????????????????????????ЩIDM?????ò??????????????????????豸??????????????8???MEMS????????”

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????????????MEMS?????????????????????????MEMS???????????????????1??MEMS IDM?д?????????2??OEM???????MEMS??????????3???辧?????????MEMS??????4????MEMS????????

“MEMS???????IDM??OEM????????????IDM????MEMS????????20~30????????????????????????????????????????????????????IDMй???????????????” Silex Himes???“?辧???????“????????”?????????????????????????????????????MEMS??????????????????????????????????????????MEMS???????й???????????????????”

???????棬MEMS????????仹???Щ????????????MEMS???????????????CMOS????ü????·??ASIC????????????MEMSо???ASICо?????????????????????????????????????“??????????????????????????????” GlobalFoundries Kumar?????“?ЩMEMS????????MEMS-CMOS????????????о????????о?????????????????????????Ч????????????????????????????????????”

????????????????????MEMS?????????г?????????????MEMS?????????????????г?????????????????????“???MEMS????????????????3%~5%??”??ò?????MEMS?????г???????Mike Rosa?????“???????????????????MEMS???????С???????????????????????г?????MEMS??????????????????????2.5D?н??3D TSV???????????”

??ò?????MEMS?????г???????Mike Rosa

??????????????????Silex????????TSI??Through Silicon Insulator??????????????????SOI??vertical SOI????TSI????MEMS??????????????????????

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??MEMS????????Щ??????????????????????????????MEMS??????????δ???????????????MEMS?????????????????????????????????“?????????????MEMS???????????5~10??????ASIC????????”??ò?????Rosa???“MEMS???????????????????deposition?????????etch?????????????????PVD???????MEMS????????????????????????????????DRIE?????ù?????‘??’?????????????????????????MEMS?????????DRIE????????????????????硣”

????MEMS??????“?????”???裬?????MEMS??????????????г???????SPTS??????????????XeF2??????????——Xactix??SPTS??????3????????й?William Johnson?????“????????????/??/????????????????????????”

SPTS??????3????????й?William Johnson

????????仰????????????豸??????????MEMS?????????????“?????????й?????弼???????ITRS????SEMI?????????MEMS????С?”??ò?????Rosa?????