Innovative Micro Technology, Inc.????? IMT??www.imtmems.com) ???????????MEMS????????IMT?????????????????? 30,000 ??????? 100 ??????????????λ???????MEMS??????????????——????IMT????????????????????????????????????侵??????塢??????????????????????????????·?????????13??????????IMT???????籣?????к???????????????????????????????????????????????????500???????????????????????????????????MEMS????????????????????????????????IMT???????????????????????????????????????????????????MEMS????????????????

IMT??????????????????????????????????????????????顣????????MEMS???????IMT????м????????t??飺
  - ?????????MEMS????
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  - ????????
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   - ????MEMS????????3D?????????????????????TSV??
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IMT????????????????????????????????????????

IMT???????

??????TSV??????

- ???????δ??????????????????????????????3D???????????????????????IMT?????????????????????????????????? 140,000??????????????????????
- IMT???????ù???????·???????????????????????????С??????
- ??????????????????????——???????????????á?IMT????????????????
• ?????????????????0.01??
• ????6 GHz ???????????-0.01 dB??
• ????15 µm??????50 µm
• ????50 µm??????250 µm
- IMT?????????????????????????????????????????????????????????

MEMS???????

- MEMS?????????????3D????????????????????·??????????????????С?????????????????
- ?????????????????????·???????·???????/??????????????????????????????·?????????????????????????????????
- ???????????·?彫??·?????????????С??10????

???????????WLP??

- ??????????WLP?????MEMS????????????????????????????????????????????????????????????????????????????????????????????????IMT????80%??????????t???????????Щ?????????С?????????????5???????IMT??????????????
- IMT???ù衢?????????????????????????????????Щ???????????????????????????????饗??IMT???????????·???????緢??????
- IMT???????????????????????????????y??дκ??????????????????????????????99%?????
- IMT???????4-5????????????????????????о????t?????????????
- IMT?????????????????????????????????????????????????????

NanoSorter® ????????????

- IMT????????????????????????????????????3D??????????????????????4????????????????????С??????г????????????t???????????????????
• ????????——???????????????MEMS?????????15??????? 0??1.4 m/sec???0???г??22 µm??
• ????3D??????4????????????????
- ????????????з????????????????????????????????????????

Cenfire® ?????????

- CenFire??????????MEMS????????????????????????
- ???????????????????????????????SPST?????????????????SP4T????
- ??????4??MEMS???????????????——6 GHz ?????????????Χ

????弼????

- ???????IMT???????????“????”????????IMT?????????????IMT???????????????????????????ɡ??????????????????????????????????????????弼??????????????????????????????????????????????е????????????Щ???????????
• ?????е???????е??????????????/???????????????????????
• ????????????е???????????????????????????????? ????? ?????韁?????
• ?????3D??????????????????3D??????ɡ?
• ???????徫???ú?????????? ??
- ???????е?IMT???????????????????????????????????????????IMT????????t?????????????????????????????????????????????5??????С?

??????
Luo Joseph
IMT?й????????
?綽??13923432260
????joseph.luo@imtmems.com