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MEMS??????Micralyne???????????????????仯
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??FTC Technologies?????????MEMS??????Micralyne???????????????2016????????MEMS?????????????????????????????????е?????????Micralyne???????????о????MEMSо????????????????????????????????

??FTC Technologies?????????MEMS??????Micralyne???????????????2016????????MEMS?????????????????????????????????е?????????Micralyne???????????о????MEMSо????????????????????????????????????Micralyne????????????????????????????????????2016???δ??????????????????????????????????Paul Pickering???????Micralyne????????CRO????????????г????????????????????Mike Ciprick?????????Mike Ciprick??Micralyne??ü??????й?????????????????????μ????????????

Pickering???????30?????????????λ?????????????????????????Micralyne????Pickering?????Innovative Micro Technology (IMT)??IMT?????λ??????????????????IMT?????????????á?Pickering????????????????й???????????????????????????????Pickering??????г???18????????г???????????????顣

??Paul Pickering????????????Collin Twanow?????Micralyne???????á?Twanow?????????Micralyne??????15????з????????飬????????????й????????????????????????????????????????±????Twanow????????????????????????????????з?????????Twanow??????????????????????????????Σ?????????MEMS????????

Pickering??Twanow??????Ciprick????????Micralyne????????Yan Qi??????Ciprick????????

Ciprick?????“???MEMS?????????г?????????????е???????Щ???????????????Micralyne???????MEMS????????????????????????????е???????????????????????????Paul???????????????????Collin????????????????????????????????Paul??Collin?????????????ù???????ù???MEMS??????????MEMS?????????”

Micralyne?????2016??????????????MEMS????????????????????????????????????顢???????IP??????????????????????MEMS?????????????Micralyne??????????????????????????С?

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??????MEMS??????IMT??Silicon Catalyst??????????