Innovative Micro Technology????????IMT?????????????MEMS??????????????????Silicon Catalyst?????????Э?飬Silicon Catalyst????????Ψ?????????????????????????????????????????Silicon Catalyst??????IMT?????????????MEMS??????????????????????????MEMS??????????????????????????????

IMT?????й?Craig Ensley???“MEMS???????????????????????????????Щ???н????????????IoT???????????????????Silicon Catalyst?????????????????????????????????MEMS?????????????????????????????????????????????????????MEMS??????????????????GPS??????????豸??????????????????????????Silicon Catalyst?????????飬??????????????????м?????”

??????????????????Щ???MEMS??????????????????????????????顢??????????????????????IMT??MEMS????????????й?????顣15??????IMT?????????????????????????????????滮?????????????????????????450??MEMS???????????????????????????IMT?????????л??棬?????μ?MEMS?????????г???

Silicon Catalyst?????й?Dan Armbrust???“????????????????????????????????????MEMS???????????????????IMT?????MEMS???????????????????????????????????????????????????IMT?????????????????”

????IMT

IMT?????????????ж????????????MEMS??????????IMT??????2000?????????MEMS??????IMT???130000??????????а??????30000???????100???????????Щ????????????????????????????????MEMS??????????ù????????????????????????????????????????????????

IMT?????????????????г???50??????????????????????????????з??????????????????????????????????????????????????????????????????????????????????綽/ DSL?л???????豸???????????IMT???????????????????????????????????????MEMS??????????

????Silicon Catalyst

Silicon Catalyst??????????????????????????????????????????2015 UBM ACE????′????????Silicon Catalyst?????????齨?????????????????????????????????????????????????????а?????????????????????????????????????o???????Silicon Catalyst????????????????????鲼???Silicon Catalyst???????????TSMC??Synopsys??AdvanTest??AutoDesk??IMEC?? IMT?? Keysight?? PDF????????? GUC????Open Silicon??